Multi layer spin-coating deposition of poly(vinylidene fluoride) films for controlling thickness and piezoelectric response

被引：57

作者：

Cardoso, V. F. ^{[1
]}

Minas, G. ^{[1
]}

Lanceros-Mendez, S. ^{[2
,3
]}

机构：

[1] Univ Minho, Algoritmi Ctr, P-4800058 Guimaraes, Portugal

[2] Univ Minho, Dept Ctr Phys, P-4710057 Braga, Portugal

[3] INL Int Iberian Nanotechnol Lab, P-4715330 Braga, Portugal

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 2013年 / 192卷

关键词：

Electroactive polymers; Transducers; Piezoelectric; Functionally graded materials; BETA-PHASE; PVDF FILMS; POLYMERS; TRANSFORMATION;

D O I：

10.1016/j.sna.2012.12.019

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Poly(vinylidene fluoride), PVDF, films have been processed by spin-coating with controlled thickness by multilayer film deposition. Films with thickness ranging from 300 nm to 25 mu m, beta-phase content up to 80%, piezoelectric coefficient d(33) up to similar to-20 pC/N and an optical transmittance in the visible range higher than 70%, were obtained with a one to three layer deposition process. The influence of the annealing temperature in the different layers is discussed as well as the possibility of obtaining functionally graded electroactive polymers though controlling spin-coating deposition parameters and thermal annealing of the different layers. (C) 2012 Elsevier B.V. All rights reserved.

引用

页码：76 / 80

页数：5

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