Molecular nitrogen vibrational temperature in an inductively coupled plasma

被引:22
作者
Kang, ZD [1 ]
Pu, YK [1 ]
机构
[1] Tsing Hua Univ, Dept Elect Engn, Beijing 100084, Peoples R China
关键词
D O I
10.1088/0256-307X/19/2/322
中图分类号
O4 [物理学];
学科分类号
0702 ;
摘要
Using a technique applied previously to vibrationally excited molecular nitrogen (N-2(*)) in the region of daytime and nighttime aurora, the emission intensity of the N-2 second positive band system in an inductively coupled plasma (ICP) has been analysed and the vibrational temperature of nitrogen molecules in the ICP is thus determined. The result shows that the vibrational temperature increases with the increase of the neutral gas pressure from 0.04Pa to 10Pa, then decreases with the further increase of the pressure from 10Pa to 100Pa. Also, this is explained by using the Boltzmann relation between the vibrational temperature and the concentration of the vibrationally excited N-2(*) (X(1)Sigma(g)(+)) molecules.
引用
收藏
页码:211 / 213
页数:3
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