A reverse Monte Carlo method for deriving optical constants of solids from reflection electron energy-loss spectroscopy spectra

被引：46

作者：

Da, B. ^{[1
,2
]}

Sun, Y. ^{[1
,2
]}

Mao, S. F. ^{[3
]}

Zhang, Z. M. ^{[4
]}

Jin, H. ^{[5
]}

Yoshikawa, H. ^{[5
]}

Tanuma, S. ^{[5
]}

Ding, Z. J. ^{[1
,2
]}

机构：

[1] Univ Sci & Technol China, Hefei Natl Lab Phys Sci Microscale, Hefei 230026, Anhui, Peoples R China

[2] Univ Sci & Technol China, Dept Phys, Hefei 230026, Anhui, Peoples R China

[3] Univ Sci & Technol China, Sch Nucl Sci & Technol, Hefei 230026, Anhui, Peoples R China

[4] Univ Sci & Technol China, Ctr Phys Experiments, Hefei 230026, Anhui, Peoples R China

[5] Natl Inst Mat Sci, Adv Surface Chem Anal Grp, Tsukuba, Ibaraki 3050047, Japan

来源：

JOURNAL OF APPLIED PHYSICS | 2013年 / 113卷 / 21期

基金：

中国国家自然科学基金;

关键词：

MEAN FREE PATHS; SCATTERING CROSS-SECTIONS; REAL METAL-SURFACES; REELS SPECTRA; BACKSCATTERED ELECTRONS; QUANTITATIVE-ANALYSIS; INELASTIC-SCATTERING; BACKGROUND REMOVAL; ELEMENTAL SOLIDS; STOPPING POWERS;

D O I：

10.1063/1.4809544

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

A reverse Monte Carlo (RMC) method is developed to obtain the energy loss function (ELF) and optical constants from a measured reflection electron energy-loss spectroscopy (REELS) spectrum by an iterative Monte Carlo (MC) simulation procedure. The method combines the simulated annealing method, i.e., a Markov chain Monte Carlo (MCMC) sampling of oscillator parameters, surface and bulk excitation weighting factors, and band gap energy, with a conventional MC simulation of electron interaction with solids, which acts as a single step of MCMC sampling in this RMC method. To examine the reliability of this method, we have verified that the output data of the dielectric function are essentially independent of the initial values of the trial parameters, which is a basic property of a MCMC method. The optical constants derived for SiO2 in the energy loss range of 8-90 eV are in good agreement with other available data, and relevant bulk ELFs are checked by oscillator strength-sum and perfect-screening-sum rules. Our results show that the dielectric function can be obtained by the RMC method even with a wide range of initial trial parameters. The RMC method is thus a general and effective method for determining the optical properties of solids from REELS measurements. (C) 2013 AIP Publishing LLC.

引用

页数：11

共 34 条

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