Optimisation of anatase TiO2 thin film growth on LaAlO3(001) using pulsed laser deposition

被引：9

作者：

Krupski, K. ^{[1
]}

Sanchez, A. M. ^{[1
]}

Krupski, A. ^{[1
,2
]}

McConville, C. F. ^{[1
]}

机构：

[1] Univ Warwick, Dept Phys, Coventry CV4 7AL, W Midlands, England

[2] Univ Portsmouth, SEES, Fac Sci, Portsmouth PO1 3QL, Hants, England

来源：

APPLIED SURFACE SCIENCE | 2016年 / 388卷

基金：

英国工程与自然科学研究理事会;

关键词：

Anatase; Titanium dioxide; Lanthanum aluminate; Pulsed laser deposition (PLD); Reflection high-energy electron diffraction (RHEED); Low-energy electron diffraction (LEED); X-ray diffraction (XRD); Atomic force microscopy (AFM); Scanning tunneling microscopy (STM); Scanning transmission electron microscopy (STEM); Growth; Thin film growth; TRANSMISSION ELECTRON-MICROSCOPY; MOLECULAR-BEAM EPITAXY; TITANIUM-DIOXIDE; SURFACE; SRTIO3; RUTILE; REACTIVITY; INTERFACES; STABILITY; SUBSTRATE;

D O I：

10.1016/j.apsusc.2016.02.214

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

Optimisation of epitaxial anatase TiO2 thin films grown on LaAlO3(0 01) substrates was performed using ultra-high vacuum based pulsed laser deposition (PLD) and studied by in-situ reflection high-energy electron diffraction (RHEED). In addition, ex-situ X-ray diffraction (XRD), atomic force microscopy (AFM), and scanning transmission electron microscopy (STEM) were performed to characterise the bulk properties of these thin films. The deposited TiO2 thin film is demonstrated to have anatase phase and bonded directly to the LaA103(0 0 1) substrate. In a separate ultra -high vacuum system low-energy electron diffraction (LEED) and scanning tunneling microscopy (STM) measurements were performed and a well-ordered two-domain (1 x 4) and (4 x 1) reconstruction of anatase surface was observed. Analysis of the STM measurements indicates the coexistence of atomic steps of both 2.5 angstrom and 5.0 angstrom, confirming the existence of two TiO2 domains. The atomic resolution STEM images reveal that the TiO2/LaAlO3 interface to be terminated with LAO layer and that the anatase-TiO2 reconstruction was found to be stable during the film growth. (C) 2016 Elsevier B.V. All rights reserved.

引用

页码：684 / 690

页数：7

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