Model Identification and Dynamic Performance Analysis of Fast Tool Servo System with High Frequency Response

Fast tool servo system could achieve precise and efficient processing of fine micro-structure for its fast and accuracy response to input control signal, which will directly affect the processing quality of the workpiece surface. Different structural forms of fast tool servo system have been designed and presented in China and overseas, with which generally low the stiffness and natural frequency, only can be used for the rule and the characteristic scale of the larger surface processing. A fast tool servo system whose thrust was up to 12500N, stiffness was 280N/mu m, the natural frequency was more than 3kHz, was developed in this paper, as well as the analytical expression of time domain and frequency domain output, which were presented by the modeling analysis; The unknown parameters of the system model were identified by frequency response test. The theoretical and experimental results indicated that the system has good dynamic performance to meet the fine micro-structure of highly efficient, high-precision processing needs.