355-nm absorption in HfO2 and SiO2 monolayers with embedded Hf nanoclusters studied using photothermal heterodyne imaging

被引:4
作者
Papernov, S. [1 ]
Shin, E.
Murray, T. [2 ]
Schmid, A. W. [1 ]
Oliver, J. B. [1 ]
机构
[1] Univ Rochester, Laser Energet Lab, 250 E River Rd, Rochester, NY 14623 USA
[2] Univ Dayton, Res Inst, Dayton, OH 45469 USA
来源
LASER-INDUCED DAMAGE IN OPTICAL MATERIALS: 2012 | 2012年 / 8530卷
关键词
Hf nanoclusters; thin films; laser damage;
D O I
10.1117/12.981642
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
The role of the Hf nanoclusters as near-UV, nanosecond-pulse laser-damage initiators in HfO2/SiO2-pair-based multilayer coatings remains speculative. In this work we use photothermal heterodyne imaging (PHI) to investigate absorption in HfO2 and SiO2 monolayers containing embedded nanometer-sized Hf clusters produced by backside-through-thin-film ablation. Hf cluster size and areal-density distributions were characterized using transmission electron microscopy. PHI measurements were taken for cluster-containing samples and for similarly prepared HfO2 and SiO2 film samples of the same thickness without clusters. These data allow us to evaluate a possible role in the damage-process initiation of two hypothetical sources of the localized absorption-Hf clusters and high-density areas of electronic defects.
引用
收藏
页数:9
相关论文
共 11 条
[1]   Photothermal heterodyne imaging of individual metallic nanoparticles: Theory versus experiment [J].
Berciaud, S ;
Lasne, D ;
Blab, GA ;
Cognet, L ;
Lounis, B .
PHYSICAL REVIEW B, 2006, 73 (04)
[2]  
Bohren C.F, 2008, Absorption and Scattering of Light by Small Particles
[3]  
Bude J., 2007, SPIE P, V6720
[4]   Vacancy and interstitial defects in hafnia [J].
Foster, AS ;
Gejo, FL ;
Shluger, AL ;
Nieminen, RM .
PHYSICAL REVIEW B, 2002, 65 (17) :1741171-17411713
[5]   MASS-SPECTROMETRY OF NEUTRAL MOLECULES SPUTTERED FROM POLYCRYSTALLINE METALS BY AR+-IONS OF 100-1000 EV [J].
GERHARD, W ;
OECHSNER, H .
ZEITSCHRIFT FUR PHYSIK B-CONDENSED MATTER, 1975, 22 (01) :41-48
[7]  
Murray P. T., 2009, P SPIE, V7404
[8]   Near-ultraviolet absorption and nanosecond-pulse-laser damage in HfO2 monolayers studied by submicrometer-resolution photothermal heterodyne imaging and atomic force microscopy [J].
Papernov, S. ;
Tait, A. ;
Bittle, W. ;
Schmid, A. W. ;
Oliver, J. B. ;
Kupinski, P. .
JOURNAL OF APPLIED PHYSICS, 2011, 109 (11)
[9]   Correlations between embedded single gold nanoparticles in SiO2 thin film and nanoscale crater formation induced by pulsed-laser radiation [J].
Papernov, S ;
Schmid, AW .
JOURNAL OF APPLIED PHYSICS, 2002, 92 (10) :5720-5728
[10]   Localized absorption effects during 351 nm, pulsed laser irradiation of dielectric multilayer thin films [J].
Papernov, S ;
Schmid, AW .
JOURNAL OF APPLIED PHYSICS, 1997, 82 (11) :5422-5432