Fabrication of large-area grating structures through laser ablation

被引：23

作者：

Bekesi, J. ^{[1
]}

Meinertz, J. ^{[1
]}

Ihlemann, J. ^{[1
]}

Simon, P. ^{[1
]}

机构：

[1] Laser Lab Gottingen eV, D-37077 Gottingen, Germany

来源：

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 2008年 / 93卷 / 01期

关键词：

D O I：

10.1007/s00339-008-4680-2

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

A Grating-Interferometer setup is shown to be ideally suited for the fabrication of high quality periodic structures over large sample areas via laser ablation. Virtually perfect line structures with periods in the submicron range are easily obtained. The capabilities and limitations of the new setup are analyzed theoretically for nanosecond and femtosecond laser sources with different coherence properties. The theoretical predictions are verified experimentally for various sample materials.

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页码：27 / 31

页数：5

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