Preparation of TiO2 Nanometer Thin Film Deposited on Organic Templates by a Layer-by-layer Self-assembly Method

被引：1

作者：

Mu, Wennning ^{[1
]}

Shi, Shuangzhi ^{[2
]}

Yang, Xiuyu ^{[1
]}

机构：

[1] Northeastern Univ, Dept Mat Sci & Engn, Qinhuangdao Branch, Qinhuangdao 066004, Peoples R China

[2] Qinhuangdao ShouGang Plate Co., Ltd, Qingdao 066003, Peoples R China

来源：

CHEMICAL ENGINEERING AND MATERIAL PROPERTIES, PTS 1 AND 2 | 2012年 / 391-392卷

关键词：

Layer-by-layer deposition; Self-assembly method; TiO2; Thin film; OPTICAL-PROPERTIES; FABRICATION; EVAPORATION;

D O I：

10.4028/www.scientific.net/AMR.391-392.432

中图分类号：

TQ [化学工业];

学科分类号：

0817 ;

摘要：

Thin organic layer-by-layer self-assembly films with negatively charged surface were prepared, which used as templates for the deposition of TiO2 on Si substrate by hydrolysis of titanate solution in acid environment. The as-deposited thin films were fully amorphous from the result of XRD, also were homogeneous and continuous produced at 80 degrees C for 2 h as presented in SEM images. The thickness of thin films grew with deposition time gradually and reached 300 nm after 12 h immersion.

引用

页码：432 / +

页数：3

共 18 条

[1] Effect of crystal structure on optical properties of TiO2 films grown by atomic layer deposition
Aarik, J
Aidla, A
Kiisler, AA
Uustare, T
Sammelselg, V
[J]. THIN SOLID FILMS, 1997, 305 (1-2) : 270 - 273
[2] Deposition and modification of titanium dioxide thin films by filtered arc deposition
Bendavid, A
Martin, PJ
Takikawa, H
[J]. THIN SOLID FILMS, 2000, 360 (1-2) : 241 - 249
[3] CHARACTERISTICS OF TITANIUM-OXIDE FILMS DEPOSITED BY AN ACTIVATED REACTIVE EVAPORATION METHOD
FUJII, T
SAKATA, N
TAKADA, J
MIURA, Y
DAITOH, Y
TAKANO, M
[J]. JOURNAL OF MATERIALS RESEARCH, 1994, 9 (06) : 1468 - 1473
[4] Properties of TiO2 films prepared by ion-assisted deposition using a gridless end-Hall ion source
Gilo, M
Croitoru, N
[J]. THIN SOLID FILMS, 1996, 283 (1-2) : 84 - 89
[5] Fabrication and characterization of TiO2 thin film prepared by a layer-by-layer self-assembly method
Kim, JH
Fujita, S
Shiratori, S
[J]. THIN SOLID FILMS, 2006, 499 (1-2) : 83 - 89
[6] Optical properties of TiO2 thin films deposited on polycarbonate by ion beam assisted evaporation
Lin, Su-Shia
Hung, Yuan-Hsun
Chen, Shin-Chi
[J]. THIN SOLID FILMS, 2009, 517 (16) : 4621 - 4625
[7] Sol-gel deposited TiO2 film on NiTi surgical alloy for biocompatibility improvement
Liu, JX
Yang, DZ
Shi, F
Cai, YJ
[J]. THIN SOLID FILMS, 2003, 429 (1-2) : 225 - 230
[8] Synthesis and photocatalytic activity of TiO2-hectorite layer-by-layer thin films
Ma, Jun
Jia, Yongazhong
Jing, Yan
Yao, Ying
Sun, Jinhe
[J]. APPLIED CLAY SCIENCE, 2010, 47 (3-4) : 433 - 437
[9] Titanium oxide thin films for NH3 monitoring: Structural and physical characterizations
Manno, D
Micocci, G
Rella, R
Serra, A
Taurino, A
Tepore, A
[J]. JOURNAL OF APPLIED PHYSICS, 1997, 82 (01) : 54 - 59
[10] Preparation and characterization of polycrystalline anatase and rutile TiO2 thin films by rf magnetron sputtering
Miao, L
Jin, P
Kaneko, K
Terai, A
Nabatova-Gabain, N
Tanemura, S
[J]. APPLIED SURFACE SCIENCE, 2003, 212 : 255 - 263

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