Design of PLC-based Measuring and Controlling System for Polysilicon Crystallization Holding Furnaces

被引：0

作者：

Xue Wendong ^{[1
]}

Huang Wensen ^{[1
]}

Wu Xinyi ^{[1
]}

Hong Yongqiang ^{[1
]}

机构：

[1] Xiamen Univ, Dept Mech & Elect Engn, Xiamen 361005, Peoples R China

来源：

PROCEEDINGS OF THE SECOND INTERNATIONAL SYMPOSIUM ON TEST AUTOMATION & INSTRUMENTATION, VOLS 1-2 | 2008年

关键词：

PLC; polysilicon; PID; configuration;

D O I：

暂无

中图分类号：

TP [自动化技术、计算机技术];

学科分类号：

0812 ;

摘要：

A measuring and controlling system based on PLC is designed for groups of holding furnaces that are used for purification of polysilicon by crystallization. By this system, crystallization temperature curve of any holding furnace can be independently controlled at the same time, polysilicon purification which is above 4N (99.99%) and batch produce can be realized. This system uses Programmable Logic Controller (PLC) as the primary controller, R-type thermocouples as temperature sensor units. The PLC outputting PID switching-values can control the Double Solenoid Valves System to affect the flow of air, and meet the requirements of temperature control precision of polysilicon crystallization. Configuration supervision system is developed on the host link computer to implement remote control, real-time data recording, error alert, crystallization temperature curves setting, etc.

引用

页码：1083 / 1086

页数：4

共 9 条

[1] Conceptual design of metallurgical processes based on thermodynamic and economic insights [J].

Chakraborty, A ;

Purkarthofer, KA ;

Linninger, AA .

CHEMICAL ENGINEERING AND PROCESSING-PROCESS INTENSIFICATION, 2004, 43 (05) :625-640

[2]

HE L, 2006, MACHINERY ELECT, V6, P25

[3]

Kato Y, 2000, TETSU TO HAGANE, V86, P717

[4]

KONAKA E, 2004, CONTROL APPL, V2, P868

[5]

MARIA G, 2004, ENERGY CONVERSION, V19, P469

[6] Minimizing temperature drift errors of conditioning circuits using artificial neural networks [J].

Pereira, JMD ;

Postolache, O ;

Girao, PMBS ;

Cretu, M .

IEEE TRANSACTIONS ON INSTRUMENTATION AND MEASUREMENT, 2000, 49 (05) :1122-1127

[7] Profile of impurities in polycrystalline silicon samples purified in an electron beam melting furnace [J].

Pires, JCS ;

Braga, AFB ;

Mei, PR .

SOLAR ENERGY MATERIALS AND SOLAR CELLS, 2003, 79 (03) :347-355

[8]

SHI ZY, 2005, J U SCI TECHNOLOGY S, V27, P212

[9]

ZHANG TS, 2007, SOLAR ENERGT HUMAN S, V1, P1174

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