Flexible surface acoustic wave resonators built on disposable plastic film for electronics and lab-on-a-chip applications

被引：178

作者：

Jin, Hao ^{[1
]}

Zhou, Jian ^{[1
]}

He, Xingli ^{[1
]}

Wang, Wenbo ^{[1
]}

Guo, Hongwei ^{[1
]}

Dong, Shurong ^{[1
]}

Wang, Demiao ^{[1
]}

Xu, Yang ^{[1
]}

Geng, Junfeng ^{[2
]}

Luo, J. K. ^{[1
,2
]}

Milne, W. I. ^{[3
]}

机构：

[1] Zhejiang Univ, Dept Informat Sci & Elect Engn, Hangzhou 310027, Zhejiang, Peoples R China

[2] Univ Bolton, Inst Renewable Energy & Environm Technol, Bolton BL3 5AB, England

[3] Univ Cambridge, Dept Engn, Cambridge CB3 0HE, England

来源：

SCIENTIFIC REPORTS | 2013年 / 3卷

基金：

中国国家自然科学基金;

关键词：

ZNO THIN-FILMS; FABRICATION; SENSORS;

D O I：

10.1038/srep02140

中图分类号：

O [数理科学和化学]; P [天文学、地球科学]; Q [生物科学]; N [自然科学总论];

学科分类号：

07 ; 0710 ; 09 ;

摘要：

Flexible electronics are a very promising technology for various applications. Several types of flexible devices have been developed, but there has been limited research on flexible electromechanical systems (MEMS). Surface acoustic wave (SAW) devices are not only an essential electronic device, but also are the building blocks for sensors and MEMS. Here we report a method of making flexible SAW devices using ZnO nanocrystals deposited on a cheap and bendable plastic film. The flexible SAW devices exhibit two wave modes - the Rayleigh and Lamb waves with resonant frequencies of 198.1 MHz and 447.0 MHz respectively, and signal amplitudes of 18 dB. The flexible devices have a high temperature coefficient of frequency, and are thus useful as sensitive temperature sensors. Moreover, strong acoustic streaming with a velocity of 3.4 cm/s and particle concentration using the SAW have been achieved, demonstrating the great potential for applications in electronics and MEMS.

引用

页数：8

共 43 条

[1] FREE WAVES IN A PLATE SUPPORTED BY A SEMI-INFINITE CONTINUUM [J].

ACHENBACH, JD ;

KESHAVA, SP .

JOURNAL OF APPLIED MECHANICS, 1967, 34 (02) :397-+

[2] Flexible piezoelectric pressure sensors using oriented aluminum nitride thin films prepared on polyethylene terephthalate films [J].

Akiyama, Morito ;

Morofuji, Yukari ;

Kamohara, Toshihiro ;

Nishikubo, Keiko ;

Tsubai, Masayoshi ;

Fukuda, Osamu ;

Ueno, Naohiro .

JOURNAL OF APPLIED PHYSICS, 2006, 100 (11)

[3] Experimental and numerical investigation of acoustic streaming excited by using a surface acoustic wave device on a 128° YX-LiNbO3 substrate [J].

Alghane, M. ;

Chen, B. X. ;

Fu, Y. Q. ;

Li, Y. ;

Luo, J. K. ;

Walton, A. J. .

JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2011, 21 (01)

[4]

[Anonymous], 2013, NTR

[5]

Auld B., 1973, Acoustic fields and waves in solids, V1st edn

[6]

Campbell C., 1998, Surface acoustic wave devices for mobile and wireless communications

[7] Wireless Calibration of a Surface Acoustic Wave Resonator as a Strain Sensor [J].

Donohoe, Brian ;

Geraghty, Dermot ;

O'Donnell, Garret E. .

IEEE SENSORS JOURNAL, 2011, 11 (04) :1026-1032

[8] Surface acoustic wave induced streaming and pumping in 128° Y-cut LiNbO3 for microfluidic applications [J].

Du, X. Y. ;

Swanwick, M. E. ;

Fu, Y. Q. ;

Luo, J. K. ;

Flewitt, A. J. ;

Lee, D. S. ;

Maeng, S. ;

Milne, W. I. .

JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2009, 19 (03)

[9] ZnO film thickness effect on surface acoustic wave modes and acoustic streaming [J].

Du, X. Y. ;

Fu, Y. Q. ;

Tan, S. C. ;

Luo, J. K. ;

Flewitt, A. J. ;

Milne, W. I. ;

Lee, D. S. ;

Park, N. M. ;

Park, J. ;

Choi, Y. J. ;

Kim, S. H. ;

Maeng, S. .

APPLIED PHYSICS LETTERS, 2008, 93 (09)

[10] Applications of wireless SAW sensing in the steel industry [J].

Fachberger, R. ;

Erlacher, A. .

EUROSENSORS XXIV CONFERENCE, 2010, 5 :224-227

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