Effect of a buffer layer on the properties of UV photodetectors based on a ZnO/diamond film structure

被引：15

作者：

Huang, Jian ^{[1
]}

Wang, Linjun ^{[1
]}

Xu, Run ^{[1
]}

Shi, Weimin ^{[1
]}

Xia, Yiben ^{[1
]}

机构：

[1] Shanghai Univ, Sch Mat Sci & Engn, Shanghai 200072, Peoples R China

来源：

SEMICONDUCTOR SCIENCE AND TECHNOLOGY | 2008年 / 23卷 / 12期

基金：

中国国家自然科学基金;

关键词：

D O I：

10.1088/0268-1242/23/12/125018

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

In this paper, ZnO films were grown on the nucleation sides of freestanding diamond substrates with and without a ZnO homobuffer layer by the radio-frequency (RF) magnetron sputtering method. The effects of buffer layers on the properties of the ZnO film and UV photodetectors based on a ZnO/freestanding diamond film structure were studied. The experimental results suggested that the buffer layer was helpful in improving the crystalline quality of ZnO/diamond heteroepitaxial films and the electrical property of the ZnO photodetectors was relative to the crystalline quality of ZnO films. For the photodetector based on the ZnO film with a buffer layer, a higher value of photo-responsivity under

引用

页数：5

共 19 条

[11] NON-DIAMOND CARBON PHASES IN PLASMA-ASSISTED DEPOSITION OF CRYSTALLINE DIAMOND FILMS - A RAMAN-STUDY [J].

SILVEIRA, M ;

BECUCCI, M ;

CASTELLUCCI, E ;

MATTIOT, FP ;

BARBAROSSA, V ;

TOMACIELLO, R ;

GALLUZZI, F .

[12] Response of CVD diamond detectors to alpha radiation [J].

Souw, EK ;

Meilunas, RJ .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT, 1997, 400 (01) :69-86

[13] SEMICONDUCTOR CLUSTERS IN THE SOL-GEL PROCESS - QUANTIZED AGGREGATION, GELATION, AND CRYSTAL-GROWTH IN CONCENTRATED ZNO COLLOIDS [J].

SPANHEL, L ;

ANDERSON, MA .

JOURNAL OF THE AMERICAN CHEMICAL SOCIETY, 1991, 113 (08) :2826-2833

[14] Fabrication of green and orange photoluminescent, undoped ZnO films using spray pyrolysis [J].

Studenikin, SA ;

Golego, N ;

Cocivera, M .

JOURNAL OF APPLIED PHYSICS, 1998, 84 (04) :2287-2294

[15] OXIDATION OF DIAMOND FILMS SYNTHESIZED BY HOT FILAMENT ASSISTED CHEMICAL VAPOR-DEPOSITION [J].

TANKALA, K ;

DEBROY, T ;

ALAM, M .

JOURNAL OF MATERIALS RESEARCH, 1990, 5 (11) :2483-2489

[16] Mechanisms behind green photoluminescence in ZnO phosphor powders [J].

Vanheusden, K ;

Warren, WL ;

Seager, CH ;

Tallant, DR ;

Voigt, JA ;

Gnade, BE .

JOURNAL OF APPLIED PHYSICS, 1996, 79 (10) :7983-7990

[17] High temperature, high voltage operation of diamond Schottky diode [J].

Vescan, A ;

Daumiller, I ;

Gluche, P ;

Ebert, W ;

Kohn, E .

[18] ZnO thin film photoconductive ultraviolet detector with fast photoresponse [J].

Xu, QA ;

Zhang, JW ;

Ju, KR ;

Yang, XD ;

Hou, X .

JOURNAL OF CRYSTAL GROWTH, 2006, 289 (01) :44-47

[19] CHARACTERIZATION OF CRYSTALLINE QUALITY OF DIAMOND FILMS BY RAMAN-SPECTROSCOPY [J].

YOSHIKAWA, M ;

KATAGIRI, G ;

ISHIDA, H ;

ISHITANI, A ;

ONO, M ;

MATSUMURA, K .

APPLIED PHYSICS LETTERS, 1989, 55 (25) :2608-2610

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