Tin(II) hexafluoroacetylacetonate as a precursor in atmospheric pressure chemical vapour deposition: synthesis, structure and properties

被引:6
|
作者
Sevastyanov, Vladimir G. [1 ]
Simonenko, Elizaveta P. [1 ]
Ignatov, Petr A. [1 ]
Popov, Viktor S. [1 ]
Churakov, Andrei V. [1 ]
Kuznetsov, Nikolai T. [1 ]
Sergienko, Vladimir S. [1 ]
机构
[1] Russian Acad Sci, NS Kurnakov Inst Gen & Inorgan Chem, Moscow 119991, Russia
基金
俄罗斯基础研究基金会;
关键词
SNO2; THIN-FILMS; TIN OXIDE; GAS SENSORS; SCIENCE; SURFACE; CVD;
D O I
10.1016/j.mencom.2012.09.003
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
A new method for the synthesis of volatile tin(II) hexafluoroacetylacetonate [Sn(C5HO2F6)(2)] was suggested, the compound was characterized by elemental analysis, IR spectroscopy, and DTA/TGA; the crystal structure was established by X-ray diffraction; the morphology and composition of the coating deposited by atmospheric pressure chemical vapour deposition were studied by SEM-EDX and XRD.
引用
收藏
页码:239 / 241
页数:3
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