High-rate deposition of YBa2Cu3O7-δ high-temperature superconducting films by IR-laser-assisted chemical vapor deposition

被引：13

作者：

Miyata, S. ^{[1
]}

Matsuse, K. ^{[1
]}

Ibi, A. ^{[1
]}

Izumi, T. ^{[1
]}

Shiohara, Y. ^{[1
]}

Goto, T. ^{[2
]}

机构：

[1] Int Superconduct Technol Ctr, Superconduct Res Lab, Koto Ku, Tokyo 1350062, Japan

[2] Tohoku Univ, Inst Mat Res, Sendai, Miyagi 9808577, Japan

来源：

SUPERCONDUCTOR SCIENCE & TECHNOLOGY | 2013年 / 26卷 / 04期

关键词：

YBCO-COATED CONDUCTORS; IBAD-PLD METHOD; THIN-FILMS; BUFFER LAYERS; GROWTH; MOCVD; SRTIO3; ORIENTATION; IRRADIATION; MECHANISMS;

D O I：

10.1088/0953-2048/26/4/045020

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

We applied an infrared-(IR-) laser-assisted chemical vapor deposition technique to YBa2Cu3O7-delta (YBCO) film fabrication in order to enhance the deposition rate to one suitable for commercial applications. IR-laser illumination during deposition effectively suppressed outgrowth of a-axis oriented grains, which strongly diminish the film's current-carrying capacity. As a result, high-performance YBCO films with critical current densities of greater than 1 x 10(6) A cm(-2) were successfully obtained at high deposition rates of up to 58 mu m h(-1) (similar to 1 mu m min(-1)) by this method.

引用

页数：10

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