Electric field localizations in thin dielectric films with thickness non-uniformities

被引：26

作者：

Puglisi, G. ^{[1
]}

Zurlo, G. ^{[1
]}

机构：

[1] Politecn Bari, Dipartimento Sci Ingn Civile & Architettura, I-70125 Bari, Italy

来源：

JOURNAL OF ELECTROSTATICS | 2012年 / 70卷 / 03期

关键词：

Charge localization; Non-uniform thickness; Electrode curvature; Electrostatic Discharge (ESD); Electroactive polymers (EAP); Thin films; SURFACE-CHARGE DENSITY;

D O I：

10.1016/j.elstat.2012.03.012

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Thickness non-uniformities in electrostatic capacitors and in electroactive polymers - arising from manufacturing processes or electromechanical induced inhomogeneous deformations - may lead to drastic charge and electric field localizations and, ultimately, to an anticipated device failure. Based on a geometric interpretation of the Gauss equation enlightening the effect of the electrode curvature, we obtain an analytic expression of the electric field and of the surface charge density localization for non perfectly planar capacitors with symmetric thickness non-uniformities. The efficiency of the model is exploited by analyzing specific boundary value problems of technological interest. (C) 2012 Elsevier B.V. All rights reserved.

引用

页码：312 / 316

页数：5

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