Glass densification under 193nm laser exposure: Experiment and theory.

被引：0
作者：
Allan, DC [1 ]
Smith, C [1 ]
Borrelli, NF [1 ]
Seward, TP [1 ]
机构：
[1] CORNING INC,GLASS & GLASS CERAM RES,CORNING,NY 14831
来源：
ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY | 1997年 / 213卷
关键词：
D O I：
暂无
中图分类号：
O6 [化学];
学科分类号：
0703 ;
摘要：
引用
收藏
页码：23 / COMP
页数：2
相关论文
共 50 条
  • [41] 193nm excimer laser inscribed Bragg gratings in microfibers for refractive index sensing
    Ran, Yang
    Tan, Yan-Nan
    Sun, Li-Peng
    Gao, Shuai
    Li, Jie
    Jin, Long
    Guan, Bai-Ou
    OPTICS EXPRESS, 2011, 19 (19): : 18577 - 18583
  • [42] LASER PHOTOLYSIS OF TRIMETHYLGALLIUM AT 193NM - QUANTUM YIELDS FOR METHYL RADICAL AND ETHANE PRODUCTION
    BRAUN, W
    KLEIN, R
    FAHR, A
    OKABE, H
    MELE, A
    CHEMICAL PHYSICS LETTERS, 1990, 166 (04) : 397 - 403
  • [43] 193-nm excimer-laser-induced densification of fused silica
    Allan, DC
    Smith, C
    Borrelli, NF
    Seward, TP
    OPTICS LETTERS, 1996, 21 (24) : 1960 - 1962
  • [44] Influence of backbone chemistry on the post-exposure bake temperature sensitivity of 193nm photoresists
    Bae, YC
    Ogawa, T
    Kavanagh, RJ
    Kobayashi, T
    Lindsay, T
    Tanaka, T
    Xu, CB
    Orsula, G
    DeSisto, J
    Hellion, M
    ADVANCES IN RESIST TECHNOLOGY AND PROCESSING XXI, PTS 1 AND 2, 2004, 5376 : 1123 - 1130
  • [45] Microfiber bragg grating inscribed using 193nm excimer laser for refractive index sensing
    Ran, Yang
    Sun, Li-Peng
    Gao, Shuai
    Quan, Zhan
    Li, Jie
    Jin, Long
    Guan, Bai-Ou
    THIRD ASIA PACIFIC OPTICAL SENSORS CONFERENCE, 2012, 8351
  • [46] Study on damage of MgF2 window irradiated by 193nm ultraviolet excimer laser
    Guo, Yanting
    Lv, Tonglin
    Yan, Rui
    Li, Xin
    Wang, Xi
    PACIFIC RIM LASER DAMAGE 2021: OPTICAL MATERIALS FOR HIGH-POWER LASERS, 2021, 11912
  • [47] Fabrication of a Doped Chitosan Surface Relief Grating Using Laser Ablation at a Wavelength of 193nm
    Aesa, Abdulsattar A.
    Walton, Christopher D.
    NONLINEAR OPTICS QUANTUM OPTICS-CONCEPTS IN MODERN OPTICS, 2022, 55 (1-2): : 113 - 124
  • [48] Fabrication of a Doped Chitosan Surface Relief Grating Using Laser Ablation at a Wavelength of 193nm
    Aesa, Abdulsattar A.
    Walton, Christopher D.
    Nonlinear Optics Quantum Optics, 2021, 55 (02): : 113 - 124
  • [49] Critical issues on the assesment of laser induced damage thresholds of fluoride multilayer coatings at 193nm
    Thielsch, R
    Heber, J
    Kaiser, N
    Martin, S
    Welsch, E
    LASER-INDUCED DAMAGE IN OPTICAL MATERIALS: 1999, 2000, 3902 : 224 - 234
  • [50] Echelle and etalon used for spectral metrology of excimer laser lithographic light sources at 193nm
    Gao Fei
    Zhao Jiangshan
    Liu Guangyi
    Wang Qian
    Bai Lujun
    AOPC 2015: MICRO/NANO OPTICAL MANUFACTURING TECHNOLOGIES; AND LASER PROCESSING AND RAPID PROTOTYPING TECHNIQUES, 2015, 9673
12345