共 50 条
- [33] Microfiber Fabry-Perot Sensors Inscribed by 193nm Excimer Laser 2012 PHOTONICS GLOBAL CONFERENCE (PGC), 2012,
- [34] Laser resistivity and damage causes in coating materials for 193nm by photothermal methods LASER-INDUCED DAMAGE IN OPTICAL MATERIALS: 1998, 1999, 3578 : 74 - 82
- [35] Changes in optical interference coatings exposed to 193nm excimer laser radiation LASER-INDUCED DAMAGE IN OPTICAL MATERIALS: 1998, 1999, 3578 : 83 - 96
- [36] Transmissivity testing of calcium fluoride windows under high pulse repetition rate laser irradiation at 193nm PACIFIC-RIM LASER DAMAGE 2018: OPTICAL MATERIALS FOR HIGH-POWER LASERS, 2018, 10713
- [37] Non-reciprocal Double-exposure materials for 193nm pitch division ADVANCES IN RESIST MATERIALS AND PROCESSING TECHNOLOGY XXVII, PTS 1 AND 2, 2010, 7639
- [38] Double-Exposure Materials for Pitch Division with 193nm Lithography: Requirements, Results ADVANCES IN RESIST MATERIALS AND PROCESSING TECHNOLOGY XXVI, 2009, 7273