Research on the Resonant Frequency Formula of V-Shaped Cantilevers

被引：7

作者：

Yang, Kai ^{[1
]}

Li, Zhigang ^{[1
]}

Jing, Yupeng ^{[1
]}

Chen, Dapeng ^{[1
]}

Ye, Tianchun ^{[1
]}

机构：

[1] Chinese Acad Sci, Inst Microelect, Lab Silicon Devices & Integrated Technol, Beijing 100864, Peoples R China

来源：

2009 4TH IEEE INTERNATIONAL CONFERENCE ON NANO/MICRO ENGINEERED AND MOLECULAR SYSTEMS, VOLS 1 AND 2 | 2009年

关键词：

cantilever; fundamental resonant frequency; triangular; V-shaped;

D O I：

10.1109/NEMS.2009.5068527

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper deduces a remarkably precise analytical formula for calculating the fundamental resonant frequency of V-shaped cantilevers using Rayleigh-Ritz method. This analytical formula, which is very convenient for MEMS sensor design, is then validated by ANSYS simulation. This formula raises a new perspective that, among all the V-shaped cantilevers, the simplest triangular cantilever can lead to maximum resonant frequency and highest sensitivity.

引用

收藏

页码：59 / 62

页数：4

相关论文

共 7 条

[1] SRRs Embedded with MEMS Cantilevers to Enable Electrostatic Tuning of the Resonant Frequency [J].

E. A. Moore ;

D. Langley ;

M. E. Jussaume ;

L. A. Rederus ;

C. A. Lundell ;

R. A. Coutu ;

P. J. Collins ;

L. A. Starman .

Experimental Mechanics, 2012, 52 :395-403

[2] SRRs Embedded with MEMS Cantilevers to Enable Electrostatic Tuning of the Resonant Frequency [J].

Moore, E. A. ;

Langley, D. ;

Jussaume, M. E. ;

Rederus, L. A. ;

Lundell, C. A. ;

Coutu, R. A., Jr. ;

Collins, P. J. ;

Starman, L. A. .

EXPERIMENTAL MECHANICS, 2012, 52 (04) :395-403

[3] Measurement of the resonant frequency of nano-scale cantilevers by hard contact readout [J].

Dohn, S. ;

Hansen, O. ;

Boisen, A. .

MICROELECTRONIC ENGINEERING, 2008, 85 (5-6) :1390-1394

[4] Nonlinear dynamic analysis of a V-shaped microcantilever of an atomic force microscope [J].

Kahrobaiyan, M. H. ;

Rahaeifard, M. ;

Ahmadian, M. T. .

APPLIED MATHEMATICAL MODELLING, 2011, 35 (12) :5903-5919

[5] Effect of Distributed Mass on the Node, Frequency, and Sensitivity of Resonant-Mode Based Cantilevers [J].

Zhang, Kewei ;

Zhu, Qianke ;

Chen, Zhe .

SENSORS, 2017, 17 (07)

[6] Modeling of I-, T- and V-Shaped Microcantilevers for Environmental Monitoring [J].

Nuryadi, Ratno .

NANOTECHNOLOGY APPLICATIONS IN ENERGY AND ENVIRONMENT, 2013, 737 :119-125

[7] A V-Shaped Microcantilever Sensor Based on a Gap Method for Real-Time Detection of E. coli Bacteria [J].

Fathy, Jino ;

Lai, Yongjun .

BIOSENSORS-BASEL, 2022, 12 (04)