A Novel High Performance Micropump for Medical Applications

The development and first test results of a novel micropump aimed at achieving elevated now rates are presented in this paper. The concept is based on the combination of silicon microvalves and a metal pump chamber. This permits an increase of the displaceable volume while the amount of employed silicon can be minimized. The microvalves are derived from a prior micropump design and optimized for elevated flow. Alternative valve sizes were employed and show the anticipated effect on the pump's flow characteristics. Flow rates of up to 85 ml/min with water and 310 ml/min with air have thus been achieved. These results promise application potential beyond the intended use in medical air humidification. Full self priming ability and bubble tolerance were maintained. Sustainable backpressures of 75 hPa with air and 350 hPa with water have been demonstrated so far.