Structural changes of diamond-like carbon films due to atomic hydrogen exposure during annealing

被引：26
|
作者：
Nakazawa, H. [1 ]
Kawabata, T. [1 ]
Kudo, M. [1 ]
Mashita, M. [1 ]
机构：
[1] Hirosaki Univ, Fac Sci & Technol, Hirosaki, Aomori 0368561, Japan
来源：
APPLIED SURFACE SCIENCE | 2007年 / 253卷 / 09期
关键词：
diamond-like carbon; sputtering; Raman spectroscopy; X-ray photoelectron spectroscopy; atomic force microscopy; hydrogen; structural properties;
D O I：
10.1016/j.apsusc.2006.09.017
中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
摘要：
We have deposited diamond-like carbon (DLC) films by radio-frequency magnetron sputtering, and have annealed the films under various conditions to investigate the effects of annealing on the structural properties by visible Raman spectroscopy, X-ray photoelectron spectroscopy and atomic force microscopy. The structural ordering of hydrogenated DLC films occurs during annealing below 400 degrees C in a vacuum and a hydrogen gas atmosphere, while unhydrogenated DLC films are not ordered during annealing even at 700 degrees C. On the other hand, the ordering and the decrease of the sp(3) content are observed for both the films after annealing under an atomic hydrogen exposure. The ordering progresses as the annealing temperature and time are increased. The! reduction of the film thickness after annealing is suppressed with increasing annealing temperature. The results suggest that both the preferential etching by atomic hydrogen and the hydrogen evolution encourage the structural changes under an atomic hydrogen exposure. (c) 2006 Elsevier B.V. All rights reserved.
引用
收藏
页码：4188 / 4196
页数：9
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