Electrothermal actuation studies on silicon carbide resonators

被引:22
作者
Mastropaolo, Enrico [1 ]
Cheung, Rebecca [1 ]
机构
[1] Univ Edinburgh, Sch Engn & Elect, Scottish Microelect Ctr, Edinburgh EH9 3JF, Midlothian, Scotland
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 2008年 / 26卷 / 06期
基金
英国工程与自然科学研究理事会;
关键词
aluminium; electrodes; microactuators; micromechanical resonators; silicon compounds; wide band gap semiconductors;
D O I
10.1116/1.3013862
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
The electromechanical behavior of SiC clamped-clamped beam (bridge) resonators with u-shaped aluminium (Al) electrodes on top has been studied as a function of electrode length, width, and spacing. Negative and positive deflections have been observed, indicating a complex interplay exhibited by the combined single material and bimorph characteristics of the resonator structures. It has been found that, both experimentally and theoretically, devices with electrodes applied on the root of the beam have similar or higher displacement amplitudes compared to devices with electrodes covering the half or the entire beam. Moreover, the displacement and vibration amplitudes can be maximized by increasing the electrode width and/or decreasing the spacing.
引用
收藏
页码:2619 / 2623
页数:5
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