Reaching the Theoretical Resonance Quality Factor Limit in Coaxial Plasmonic Nanoresonators Fabricated by Helium Ion Lithography

被引：108

作者：

Melli, M. ^{[1
]}

Polyakov, A. ^{[1
]}

Gargas, D. ^{[1
]}

Huynh, C. ^{[2
]}

Scipioni, L. ^{[2
]}

Bao, W. ^{[1
]}

Ogletree, D. F. ^{[1
]}

Schuck, P. J. ^{[1
]}

Cabrini, S. ^{[1
]}

Weber-Bargioni, A. ^{[1
]}

机构：

[1] Univ Calif Berkeley, Lawrence Berkeley Natl Lab, Mol Foundry, Berkeley, CA 94720 USA

[2] Carl Zeiss Microscopy LLC, Peabody, MA 01960 USA

来源：

NANO LETTERS | 2013年 / 13卷 / 06期

关键词：

Focus ion beam; helium ion microscope; coaxial apertures; plasmonics; nanofabrication; OPTICAL-TRANSMISSION; NANO-OPTICS; NANOPARTICLES; INDEX;

D O I：

10.1021/nl400844a

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

Optical antenna structures have revolutionized the field of nano-optics by confining light to deep subwavelength dimensions for spectroscopy and sensing. In this work, we fabricated coaxial optical antennae with sub-10-nanometer critical dimensions using helium ion lithography (HIL). Wavelength dependent transmission measurements were used to determine the wavelength-dependent optical response. The quality factor of 11 achieved with our HIL fabricated structures matched the theoretically predicted quality factor for the idealized flawless gold resonators calculated by finite-difference time-domain (FDTD). For comparison, coaxial antennae with 30 nm critical dimensions were fabricated using both HIL and the more common Ga focus ion beam lithography (Ga-FIB). The quality factor of the Ga-FIB resonators was 60% of the ideal HIL results for the same design geometry due to limitations in the Ga-FIB fabrication process.

引用

页码：2687 / 2691

页数：5

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