Thermal lens investigation in amorphous SiN

被引：6
作者：
Anjos, V. [1 ]
Andrade, A. A. [2 ]
Bell, M. J. V. [1 ]
机构：
[1] Univ Fed Juiz de Fora, Dept Fis, BR-36036900 Juiz De Fora, MG, Brazil
[2] Univ Estadual Norte Fluminense, Ctr Ciencias & Tecnol, Lab Ciencias Fis, BR-28013602 Campos Dos Goytacazes, RJ, Brazil
来源：
APPLIED SURFACE SCIENCE | 2008年 / 255卷 / 03期
关键词：
Thermal lens; Thermal conductivity; Thermal diffusivity; Silicon nitride; SiN;
D O I：
10.1016/j.apsusc.2008.07.011
中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
摘要：
In this work we report the use of thermal lens (TLs) technique to determine the thermo-optical parameters, such as thermal conductivity ( K), thermal diffusivity (D) and the optical path dependence with temperature (ds/dT) of amorphous SiN. Our results indicate that ds/dT is positive at room temperature. Moreover, the obtained values of thermal diffusivity and thermal conductivity are in good agreement with that found in the literature. (c) 2008 Elsevier B. V. All rights reserved.
引用
收藏
页码：698 / 700
页数：3
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