ANNEALING TREATMENT OF ZnO THIN FILMS DEPOSITED BY SOL-GEL METHOD

被引：9
作者：
Saleem, M. [1 ]
Fang, L. [1 ]
Huang, Q. L. [1 ]
Li, D. C. [1 ]
Wu, F. [1 ]
Ruan, H. B. [1 ,2 ]
Kong, C. Y. [2 ]
机构：
[1] Chongqing Univ, Dept Appl Phys, Chongqing 400044, Peoples R China
[2] Chongqing Normal Univ, Opt Engn Key Lab, Chongqing 400030, Peoples R China
来源：
SURFACE REVIEW AND LETTERS | 2012年 / 19卷 / 05期
基金：
中国国家自然科学基金;
关键词：
Sol-gel method; spin coating; microstructure; surface morphology; optical properties; OPTICAL-PROPERTIES; PREFERRED ORIENTATION; CONDUCTIVE FILMS; TRANSPARENT; ULTRAVIOLET; PROPERTY;
D O I：
10.1142/S0218625X12500552
中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
摘要：
Highly transparent ZnO thin films were deposited on glass substrates by using a simple and inexpensive multi-step sol-gel spin coating process. This research investigated the effects of annealing temperature in the range from 350-600 degrees C on the microstructure, surface morphology and optical properties of thin films by using XRD, SEM and transmittance spectra. The XRD results showed that the c-axis orientation of ZnO thin films was improved with the increase of annealing temperature. The grain size increases from 16.6-19.7 nm with the increase in temperature. The transmittance spectra indicated that the transmittance and direct optical band gap Eg of the films showed a decreased trend with annealing temperature. It is found that the tensile stress exist in the films, which decreases with the increase in annealing temperature up to 500 degrees C, on further increasing the annealing temperature up to 600 degrees C, the stress in the film changes from tensile to compressive nature.
引用
收藏
页数：9
相关论文
共 50 条
[1]   Doping and annealing effects on ZnO:Cd thin films by sol-gel method [J].
Li, Gang ;
Zhu, Xuebin ;
Tang, Xianwu ;
Song, Wenhai ;
Yang, Zhaorong ;
Dai, Jianming ;
Sun, Yuping ;
Pan, Xu ;
Dai, Songyuan .
JOURNAL OF ALLOYS AND COMPOUNDS, 2011, 509 (14) :4816-4823
[2]   Synthesis and characterization of Ca doped ZnO thin films by sol-gel method [J].
Istrate, Anca-Ionela ;
Nastase, Florin ;
Mihalache, Iuliana ;
Comanescu, Florin ;
Gavrila, Raluca ;
Tutunaru, Oana ;
Romanitan, Cosmin ;
Tucureanu, Vasilica ;
Nedelcu, Monica ;
Muller, Raluca .
JOURNAL OF SOL-GEL SCIENCE AND TECHNOLOGY, 2019, 92 (03) :585-597
[3]   Preparation and characterization of ZnO transparent semiconductor thin films by sol-gel method [J].
Tsay, Chien-Yie ;
Fan, Kai-Shiung ;
Chen, Sih-Han ;
Tsai, Chia-Hao .
JOURNAL OF ALLOYS AND COMPOUNDS, 2010, 495 (01) :126-130
[4]   Transparent conducting ZnO:Al, In and Sn thin films deposited by the sol-gel method [J].
Lee, JH ;
Park, BO .
THIN SOLID FILMS, 2003, 426 (1-2) :94-99
[5]   Influence of the spin acceleration time on the properties of ZnO:Ga thin films deposited by sol-gel method [J].
Sbeta, M. ;
Atilgan, A. ;
Atli, A. ;
Yildiz, A. .
JOURNAL OF SOL-GEL SCIENCE AND TECHNOLOGY, 2018, 86 (02) :513-520
[6]   Effect of cobalt doping on ZnO thin films deposited by sol-gel method [J].
Dhruvashi ;
Shishodia, P. K. .
THIN SOLID FILMS, 2016, 612 :55-60
[7]   Optical Properties of ZnO thin films prepared by Sol-gel method [J].
Khelladi, Nesrine Bouchenak ;
Sari, Nasr Eddine Chabane .
2014 NORTH AFRICAN WORKSHOP ON DIELECTRIC MATERIALS FOR PHOTOVOLTAIC SYSTEMS (NAWDMPV), 2014,
[8]   Multifractal analysis of Mg-doped ZnO thin films deposited by sol-gel spin coating method [J].
Talu, Stefan ;
Boudour, Samah ;
Bouchama, Idris ;
Astinchap, Bandar ;
Ghanbaripour, Hamta ;
Akhtar, Muhammad Saeed ;
Zahra, Sarwat .
MICROSCOPY RESEARCH AND TECHNIQUE, 2022, 85 (04) :1213-1223
[9]   Effects of cooling rate and post-heat treatment on properties of ZnO thin films deposited by sol-gel method [J].
Kim, Min Su ;
Yim, Kwang Gug ;
Lee, Dong-Yul ;
Kim, Jin Soo ;
Kim, Jong Su ;
Son, Jeong-Sik ;
Leem, Jae-Young .
APPLIED SURFACE SCIENCE, 2011, 257 (21) :9019-9023
[10]   Effect of the annealing process on the properties of ZnO thin films prepared by the sol-gel method [J].
Arab, Louiza ;
Amri, Abdelhak ;
Meftah, Afek ;
Latif, Aya ;
Tibermacine, Toufik ;
Sengouga, Nouraddine .
CHEMICAL PHYSICS IMPACT, 2023, 7
12345