Design and Characterization of Single Beam for Latching Electrothermal Microswitch

被引：1

作者：

Zhang, Ying ^{[1
]}

Wang, Hong ^{[1
]}

Wang, Yan ^{[1
]}

Mao, Shengping ^{[1
]}

Ding, Guifu ^{[1
]}

机构：

[1] Shanghai Jiao Tong Univ, Res Inst Micro Nano Sci & Technol, Natl Key Lab Nano Micro Fabricat Technol, Shanghai 200240, Peoples R China

来源：

AUTOMATION EQUIPMENT AND SYSTEMS, PTS 1-4 | 2012年 / 468-471卷

关键词：

electrothermal; microswitch; latching; bistable micromechanisms (BMs); single beam; characterization; MICROACTUATORS;

D O I：

10.4028/www.scientific.net/AMR.468-471.286

中图分类号：

TP [自动化技术、计算机技术];

学科分类号：

0812 ;

摘要：

This paper presents the design, fabrication and characterization of single beam for latching electrothermal microswitch. This microswitch consists of two cantilever beams using bimorph electrothermal actuator with mechanical latching for performing low power bistable relay applications. A stable state can be acquired without continuous power which is only needed to switch between two stable states of the microactuator. The single beam is discussed mainly to judge the possibility of realizing the designed function. First, reasonable shape of the resistance is designed using finite element analysis software ANSYS. Then, mechanical performance was characterized by WYKO NT1100 optical profiling system, the tip deflection of single beam can meet the designed demand.

引用

页码：286 / 289

页数：4

共 10 条

[1] Magnetic micro-actuators and systems (MAGMAS) [J].