Demonstration of Copper Co-Fired (Na, K)NbO3 Multilayer Structures for Piezoelectric Applications

被引:52
作者
Gao, Lisheng [1 ]
Ko, Song-Won [1 ]
Guo, Hanzheng [1 ]
Hennig, Eberhard [2 ]
Randall, Clive A. [1 ]
机构
[1] Penn State Univ, Mat Res Inst, Ctr Dielect & Piezoelect, University Pk, PA 16802 USA
[2] PI Ceram GmbH, Lindenstr, D-07589 Lederhose, Germany
基金
美国国家科学基金会;
关键词
CERAMICS; SPECTROSCOPY; ELECTRODE;
D O I
10.1111/jace.14207
中图分类号
TQ174 [陶瓷工业]; TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
A Li and Ta modified (Na, K) NbO3 piezoelectric ceramic has been successfully co-fired with inner copper electrodes in a reduced atmosphere. Highly dense NKN ceramics (95% relative density, 4.64 g/cm(3)) were obtained by sintering the samples in a low oxygen partial pressure (low pO(2)) atmosphere at 1050 degrees C. The poly(propylene carbonate) binder system was used to permit a clean burnout at low temperature in N-2 atmosphere, and also prevent the electrode copper particles from undergoing any oxidation. No interdiffusion of copper, chemical reactions, and/or carbon residues were observed in the grains, grain boundaries, or at the electrode-ceramic interface of the co-fired samples from a detailed transmission electron microscopy (TEM) analysis. Dielectric and piezoelectric properties were characterized from those co-fired prototyped samples. The samples displayed high relative dielectric permittivity above 800, with low dielectric loss about 3.6%. A normalized strain coefficient d(33)(*) (max. strain/max. electric field) of d(33)(*) = 220 pm/V was obtained under unipolar converse electromechanical measurement at 20 kV/cm. This paper presents the feasibility of co-firing a Cu inner electrode with NKN ceramics toward multilayer lead-free piezoelectric applications, providing an engineering route to narrow the performance differences between soft lead-based piezoelectrics and lead-free materials.
引用
收藏
页码:2017 / 2023
页数:7
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