Investigations of the composition of macro-, micro- and nanoporous silicon surface by ultrasoft X-ray spectroscopy and X-ray photoelectron spectroscopy

被引：22

作者：

Lenshin, A. S. ^{[1
]}

Kashkarov, V. M. ^{[1
]}

Domashevskaya, E. P. ^{[1
]}

Bel'tyukov, A. N. ^{[2
]}

Gil'mutdinov, F. Z. ^{[2
]}

机构：

[1] Voronezh State Univ, Voronezh 394006, Russia

[2] RAN, Physicotech Inst, Ural Dept, Izhevsk 426000, Russia

来源：

APPLIED SURFACE SCIENCE | 2015年 / 359卷

关键词：

Porous silicon; Electron spectroscopy; Oxidation; POROUS SILICON; OPTICAL-PROPERTIES; MACROPOROUS SILICON; ELECTRON-STRUCTURE; PHASE-COMPOSITION; PHOTOLUMINESCENCE; PHOTOEMISSION; ACID;

D O I：

10.1016/j.apsusc.2015.10.140

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

The features of atomic and electron structure and phase composition of the surface in the samples of macro-, micro- and nanoporous silicon and their changes with depth were investigated with the use of Xray photoelectron spectroscopy, ultrasoft X-ray emission spectroscopy and scanning electron microscopy. Analysis of the X-ray emission spectra applying the simulation method allowed to follow the trends in the changes of the composition for the investigated samples starting from the surface and into the bulk and to show the differences in the phase composition between the samples of porous silicon with different pores size. (C) 2015 Elsevier B.V. All rights reserved.

引用

收藏

页码：550 / 559

页数：10

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