Investigations of the composition of macro-, micro- and nanoporous silicon surface by ultrasoft X-ray spectroscopy and X-ray photoelectron spectroscopy

被引：17
作者：
Lenshin, A. S. [1 ]
Kashkarov, V. M. [1 ]
Domashevskaya, E. P. [1 ]
Bel'tyukov, A. N. [2 ]
Gil'mutdinov, F. Z. [2 ]
机构：
[1] Voronezh State Univ, Voronezh 394006, Russia
[2] RAN, Physicotech Inst, Ural Dept, Izhevsk 426000, Russia
来源：
APPLIED SURFACE SCIENCE | 2015年 / 359卷
关键词：
Porous silicon; Electron spectroscopy; Oxidation; POROUS SILICON; OPTICAL-PROPERTIES; MACROPOROUS SILICON; ELECTRON-STRUCTURE; PHASE-COMPOSITION; PHOTOLUMINESCENCE; PHOTOEMISSION; ACID;
D O I：
10.1016/j.apsusc.2015.10.140
中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
摘要：
The features of atomic and electron structure and phase composition of the surface in the samples of macro-, micro- and nanoporous silicon and their changes with depth were investigated with the use of Xray photoelectron spectroscopy, ultrasoft X-ray emission spectroscopy and scanning electron microscopy. Analysis of the X-ray emission spectra applying the simulation method allowed to follow the trends in the changes of the composition for the investigated samples starting from the surface and into the bulk and to show the differences in the phase composition between the samples of porous silicon with different pores size. (C) 2015 Elsevier B.V. All rights reserved.
引用
收藏
页码：550 / 559
页数：10
相关论文
共 22 条
  • [1] VISIBLE-LIGHT EMISSION DUE TO QUANTUM SIZE EFFECTS IN HIGHLY POROUS CRYSTALLINE SILICON
    CULLIS, AG
    CANHAM, LT
    [J]. NATURE, 1991, 353 (6342) : 335 - 338
  • [2] XPS, USXS and PLS investigations of porous silicon
    Domashevskaya, EP
    Kashkarov, VM
    Manukovskii, EY
    Shchukarev, AV
    Terekhov, VA
    [J]. JOURNAL OF ELECTRON SPECTROSCOPY AND RELATED PHENOMENA, 1998, 88 : 969 - 972
  • [3] Porous silicon for electrical isolation in radio frequency devices: A review
    Gautier, G.
    Leduc, P.
    [J]. APPLIED PHYSICS REVIEWS, 2014, 1 (01):
  • [4] PROBING THE TRANSITION LAYER AT THE SIO2-SI INTERFACE USING CORE LEVEL PHOTOEMISSION
    HOLLINGER, G
    HIMPSEL, FJ
    [J]. APPLIED PHYSICS LETTERS, 1984, 44 (01) : 93 - 95
  • [5] Chemical modification of porous and corrugated silicon surfaces in polyacrylic acid solutions
    Kashkarov, V. M.
    Len'shin, A. S.
    Seredin, P. V.
    Agapov, B. L.
    Tsipenuk, V. N.
    [J]. JOURNAL OF SURFACE INVESTIGATION, 2012, 6 (05): : 776 - 781
  • [6] Electron structure of porous silicon obtained without the use of HF acid
    Kashkarov, Vladimir
    Nazarikov, Igor
    Lenshin, Alexander
    Terekhov, Vladimir
    Turishchev, Sergey
    Agapov, Boris
    Pankov, Konstantin
    Domashevskaya, Evelina
    [J]. PHYSICA STATUS SOLIDI C - CURRENT TOPICS IN SOLID STATE PHYSICS, VOL 6, NO 7, 2009, 6 (07): : 1557 - 1560
  • [7] The preparation and properties of "porous silicon-nickel ferrite" nanoheterocomposites for gas detectors
    Kononova, Irina E.
    Moshnikov, Vyatcheslav A.
    Olchowik, Grazyna
    Len'shin, Alexandr S.
    Gareev, Kamil G.
    Soboleva, Ekaterina A.
    Kuznetsov, Vladimir V.
    Olchowik, Jan M.
    [J]. JOURNAL OF SOL-GEL SCIENCE AND TECHNOLOGY, 2014, 71 (02) : 234 - 240
  • [8] Impedance and magneto-optical properties of porous silicon-cobalt nanocomposites
    Korolev, F. A.
    Gan'shina, E. A.
    Demidovich, G. B.
    Kozlov, S. N.
    [J]. PHYSICS OF THE SOLID STATE, 2007, 49 (03) : 528 - 531
  • [9] Optical characteristics of porous silicon structures
    Len'shin, A. S.
    Kashkarov, V. M.
    Seredin, P. V.
    Agapov, B. L.
    Minakov, D. A.
    Tsipenyuk, V. N.
    Domashevskaya, E. P.
    [J]. TECHNICAL PHYSICS, 2014, 59 (02) : 224 - 229
  • [10] Optical properties of porous silicon processed in tetraethyl orthosilicate
    Len'shin, A. S.
    Kashkarov, V. M.
    Tsipenyuk, V. N.
    Seredin, P. V.
    Agapov, B. L.
    Minakov, D. A.
    Domashevskaya, E. P.
    [J]. TECHNICAL PHYSICS, 2013, 58 (02) : 284 - 288
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