Deburring and surface conditioning of micro milled structures by micro peening and ultrasonic wet peening

被引：37

作者：

Horsch, Ch. ^{[1
]}

Schulze, V. ^{[1
]}

Loehe, D. ^{[1
]}

机构：

[1] Karlsruhe Univ TH, Inst Mat Sci & Engn I, D-76128 Karlsruhe, Germany

来源：

MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS | 2006年 / 12卷 / 07期

关键词：

Micromachining;

D O I：

10.1007/s00542-006-0087-1

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Deburring and smooth finishing processes for milled workpieces are well known in macro mould and die manufacturing. These processes are not directly transferable to micro parts and must be modified for this purpose. Therefore, deburring and surface conditioning by micro peening and ultrasonic wet peening of structures made by micro milling of quenched and tempered tool steel are investigated. The results are presented in this paper.

引用

页码：691 / 696

页数：6