Simulation of Three-Dimensional Solid-by-Solid Model and Application to Electrochemical Engineering

被引:3
作者
Kaneko, Y. [1 ]
Hiwatari, Y. [2 ]
Ohara, K. [3 ]
Asa, F. [3 ]
机构
[1] Kyoto Univ, Grad Sch Informat, Dept Appl Anal & Complex Dynam Syst, Kyoto 6068501, Japan
[2] Toyota Phys & Chem Res Inst, Nagakute, Aichi 4801192, Japan
[3] C Uyemura & Co Ltd, Hirakata, Osaka 5730065, Japan
来源
ELECTROCHEMICAL ENGINEERING FOR THE 21ST CENTURY (DEDICATED TO RICHARD C. ALKIRE) | 2010年 / 28卷 / 29期
关键词
MONTE-CARLO-SIMULATION; SHAPE EVOLUTION; ELECTRODEPOSITION; ADDITIVES; GROWTH;
D O I
10.1149/1.3502438
中图分类号
O646 [电化学、电解、磁化学];
学科分类号
081704 ;
摘要
A multi-scale kinetic Monte Carlo method has been developed for the molecular simulation of electrodeposition. The basic system is the solid-by-solid model which is a new model for crystal growth with vacancy formation. This model is extended to include the solution and the diffusion layer to take into account the concentration overpotential. The migration of ions in solution is simulated by the coarse-grained random walk. Since the time and length scales in the diffusion layer are largely different from those of the atomic events on the electrode surface, a multi-scale simulation method has been used for the diffusion layer. We have performed the simulation of copper electrodeposition and confirmed that the shape evolution of the surface can be simulated with the formation of the concentration gradient in the diffusion layer.
引用
收藏
页码:1 / 7
页数:7
相关论文
共 8 条
[1]   Multiscale diffusion Monte Carlo simulation of epitaxial growth [J].
Chou, Chuan-Chih ;
Falk, Michael L. .
JOURNAL OF COMPUTATIONAL PHYSICS, 2006, 217 (02) :519-529
[2]   Molecular simulation for nanotechnologies: Application to industry [J].
Hiwatari, Y ;
Kaneko, Y ;
Ishida, H .
MOLECULAR SIMULATION, 2004, 30 (13-15) :819-826
[3]   Monte Carlo simulation of thin film growth with lattice defects [J].
Kaneko, Y ;
Hiwatari, Y ;
Ohara, K ;
Murakami, T .
JOURNAL OF THE PHYSICAL SOCIETY OF JAPAN, 2000, 69 (11) :3607-3613
[4]  
Kaneko Y., 2008, ECS T PHOENIX AZ, V13, P1
[5]  
Kaneko Y., 2003, RECENT RES DEV PHYS, V47
[6]   Effect of additives on shape evolution during electrodeposition I. Multiscale simulation with dynamically coupled kinetic Monte Carlo and moving-boundry finite-volume codes [J].
Li, Xiaohai ;
Drews, Timothy O. ;
Rusli, Effendi ;
Xue, Feng ;
He, Yuan ;
Braatz, Richard ;
Alkire, Richard .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 2007, 154 (04) :D230-D240
[7]   Effect of additives on shape evolution during electrodeposition - III. Trench infill for on-chio interconnects [J].
Qin, Yan ;
Li, Xiaohai ;
Xue, Feng ;
Vereecken, Philippe M. ;
Andricacos, Panayotis ;
Deligianni, Hariklia ;
Braatz, Richard D. ;
Alkire, Richard C. .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 2008, 155 (03) :D223-D233
[8]   Effect of additives on shape evolution during electrodeposition - II. Parameter estimation from roughness evolution experiments [J].
Rusli, Effendi ;
Xue, Feng ;
Drews, Timothy O. ;
Vereecken, Philippe M. ;
Andricacos, Panos ;
Deligianni, Hariklia ;
Braatz, Richard D. ;
Alkire, Richard C. .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 2007, 154 (11) :D584-D597