Direct microfabrication using an X-ray micro-beam

被引：2
|
作者：
Katoh, T
Zhang, YP
Kagoshima, Y
Tsusaka, Y
Matsui, J
机构：
[1] Sumitomo Heavy Ind Ltd, Tokyo 1888585, Japan
[2] Himeji Inst Technol, Himeji, Hyogo 6791297, Japan
来源：
SENSORS AND ACTUATORS A-PHYSICAL | 2002年 / 97-8卷
关键词：
direct writing; micro-beam; X-ray lens; PTFE; PMMA; synchrotron radiation;
D O I：
10.1016/S0924-4247(02)00011-0
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
A micro-beam of hard X-ray (10 keV) as small as 5 mum in diameter has been generated using a single refractive lens (SRL) and been applied for direct writing, which may find possible applications in three-dimensional (3D) micro-fabrication. The refractive lenses are parabolic-shaped concave lenses with a radius of 4 pm and an aperture of 179 pm and have been produced using our high aspect-ratio techniques with synchrotron radiation (SR). (C) 2002 Elsevier Science B.V. All rights reserved.
引用
收藏
页码：725 / 728
页数：4
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