共 31 条
- [1] [Anonymous], 1971, MOL PHOTOELECTRON SP
- [3] ALKALI-DEVELOPABLE SILICONE-BASED NEGATIVE PHOTORESIST (SNP) FOR DEEP UV, ELECTRON-BEAM, AND X-RAY LITHOGRAPHIES [J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, 1989, 28 (10): : L1863 - L1865
- [6] ANALYSIS AND OPTIMIZATION OF GAS-PHASE REACTIONS .18. THE PYROLYSIS OF METHYL AZIDE [J]. CHEMISCHE BERICHTE-RECUEIL, 1981, 114 (01): : 220 - 226
- [9] Bridges A.S., 1994, SURF REV LETT, V1, P573, DOI [10.1142/S0218625X94000692, DOI 10.1142/S0218625X94000692]
- [10] BU Y, 1992, SURFACE SCI LETT, V264, P15111