Installation of a technological center for highly efficient optical gratings at Helmholtz-Zentrum Berlin (HZB)

被引：8

作者：

Loechel, B. ^{[1
]}

Erko, A. ^{[1
]}

Lemke, St. ^{[1
]}

Nelles, B. ^{[2
]}

Schmidt, M. ^{[3
]}

Senf, F. ^{[1
]}

机构：

[1] Inst Nanometre Opt & Technol HZB, Albert Einstein Str 15, D-12489 Berlin, Germany

[2] DIOS GmbH, D-53902 Bad Munstereifel, Germany

[3] Tech Univ Berlin, Chair micro & precis devices, D-10623 Berlin, Germany

来源：

11TH INTERNATIONAL CONFERENCE ON SYNCHROTRON RADIATION INSTRUMENTATION (SRI 2012) | 2013年 / 425卷

关键词：

D O I：

10.1088/1742-6596/425/21/212012

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

In 2009 Carl Zeiss stopped the manufacture of precision gratings. All users of their gratings were very concerned about this decision, since they all need precision gratings for their experiments. One of the institutes of the HZB, the Institute for Nanometer Optics and Technology (INT), has extensive experience in micro fabrication (technology group). In spring 2010, HZB decided to take over the old C. Zeiss grating fabrication and build up its own technology center for grating fabrication. In March 2010, the INT applied to the Senate of Berlin for funding for our project from the European Regional Development Fund (ERDF). In October 2010, HZB received an approval of its application from the Senate of Berlin (contract No 20072013 2/43). Using this governmental support, HZB will install all necessary equipment and processes to fulfill these demands until end of 2013.

引用

页数：4