High-Frequency Piezoelectric-on-Si MEMS Resonator and Numerical Method for Parameter Extraction

This paper presents the design and characterization of a piezoelectrically-transduced (AlN) on silicon micro-mechanical resonator operating in its lateral bulk acoustic width-extensional mode at 28.73 MHz. The equivalent m-BVD model of the resonator is extracted using a least-squares-error algorithm which is presented in this paper. We report a mechanical Q factor of 5970 and motional resistance R-x of 273 Omega in vacuum (p(0) = 30 mTorr) for the fundamental bulk acoustic mode for a 240 mu m x 149 mu m resonator. A good fit between the m-BVD model and the experimental data is obtained using the numerical fitting algorithm.