Reaction rates of refractory metal oxidation in cold oxygen plasma

被引：6
|
作者：
Saburi, T
Suzuki, T
Kiuchi, K
Fujii, Y
机构：
[1] Tokyo Inst Technol, Nucl Reactors Res Lab, Meguro Ku, Tokyo 1528550, Japan
[2] Japan Atom Res Inst, Dept Nucl Energy Syst, Tokai, Ibaraki 3191195, Japan
来源：
THIN SOLID FILMS | 2006年 / 506卷
关键词：
plasma oxidation; molybdenum; zirconium; titanium;
D O I：
10.1016/j.tsf.2005.08.077
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
The enhancement of oxidation of some metals in the presence of plasma was studied. To test the heat-resistant and corrosion-resistant materials, molybdenum, zirconium and titanium were selected as the evaluation material. The weight change of specimens resulting from the reaction with oxygen was measured by electro-microbalance in the temperature range 300-600 degrees C at the oxygen pressure of 5 Pa. Each specimen was found to be oxidized and changes its weight according to the definite oxidation law. The activation energy for oxidation was evaluated. Oxidation by plasma was confirmed to be accelerated far faster than thermal oxidation in the low temperature region. (c) 2005 Published by Elsevier B.V.
引用
收藏
页码：331 / 336
页数：6
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