Tribological and cutting behavior of silicon nitride tools coated with monolayer- and multilayer-microcrystalline HFCVD diamond films

被引：35
作者：
Chen, Naichao [1 ]
Shen, Bin [1 ]
Yang, Guodong [1 ]
Sun, Fanghong [1 ]
机构：
[1] Shanghai Jiao Tong Univ, Sch Mech Engn, Shanghai 200240, Peoples R China
来源：
APPLIED SURFACE SCIENCE | 2013年 / 265卷
基金：
中国国家自然科学基金;
关键词：
Diamond; CVD coating; Friction; Wear; Cutting tools; Silicon nitride; SLIDING SPEED; RAMAN-SPECTROSCOPY; DOPED DIAMOND; WEAR BEHAVIOR; NORMAL LOAD; FRICTION; SI3N4; WATER; CERAMICS; TRIBOSYSTEMS;
D O I：
10.1016/j.apsusc.2012.11.133
中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
摘要：
Monolayer-micrometric (MN-MCD), monolayer-submicrometric (MN-SMCD) and multilayer-micrometric (MT-MCD) diamond films are grown on silicon nitride substrates by hot filament chemical vapor deposition (HFCVD) technique. The as-deposited diamond films are characterized with scanning electron microscope (SEM), X-ray diffraction (XRD), energy-dispersive X-ray spectrometer (EDS), Raman spectrum and 3D surface topography. Tribological properties are assessed by the sliding tests using a reciprocal motion ball-on-flat (BOF) configuration. The friction coefficients are measured as 0.126 for the MN-MCD films, 0.076 for the MN-SMCD films and 0.071 for the MT-MCD films during dry sliding against silicon nitride counterface. The different carbon content of the films may result in the visible diminution of friction coefficient for the MT-MCD films relative to the MN-MCD films. The results show that the MN-MCD and MT-MCD films present the much higher wear resistance than the MN-SMCD films. Meanwhile, the cutting performances of as-deposited diamond films are evaluated by machining aluminum-silicon alloy material. The experimental results show that the MT-MCD insert presents the best behavior regarding the tool wear. (C) 2012 Elsevier B.V. All rights reserved.
引用
收藏
页码：850 / 859
页数：10
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