Tribological and cutting behavior of silicon nitride tools coated with monolayer- and multilayer-microcrystalline HFCVD diamond films

被引：35
作者：
Chen, Naichao [1 ]
Shen, Bin [1 ]
Yang, Guodong [1 ]
Sun, Fanghong [1 ]
机构：
[1] Shanghai Jiao Tong Univ, Sch Mech Engn, Shanghai 200240, Peoples R China
来源：
APPLIED SURFACE SCIENCE | 2013年 / 265卷
基金：
中国国家自然科学基金;
关键词：
Diamond; CVD coating; Friction; Wear; Cutting tools; Silicon nitride; SLIDING SPEED; RAMAN-SPECTROSCOPY; DOPED DIAMOND; WEAR BEHAVIOR; NORMAL LOAD; FRICTION; SI3N4; WATER; CERAMICS; TRIBOSYSTEMS;
D O I：
10.1016/j.apsusc.2012.11.133
中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
摘要：
Monolayer-micrometric (MN-MCD), monolayer-submicrometric (MN-SMCD) and multilayer-micrometric (MT-MCD) diamond films are grown on silicon nitride substrates by hot filament chemical vapor deposition (HFCVD) technique. The as-deposited diamond films are characterized with scanning electron microscope (SEM), X-ray diffraction (XRD), energy-dispersive X-ray spectrometer (EDS), Raman spectrum and 3D surface topography. Tribological properties are assessed by the sliding tests using a reciprocal motion ball-on-flat (BOF) configuration. The friction coefficients are measured as 0.126 for the MN-MCD films, 0.076 for the MN-SMCD films and 0.071 for the MT-MCD films during dry sliding against silicon nitride counterface. The different carbon content of the films may result in the visible diminution of friction coefficient for the MT-MCD films relative to the MN-MCD films. The results show that the MN-MCD and MT-MCD films present the much higher wear resistance than the MN-SMCD films. Meanwhile, the cutting performances of as-deposited diamond films are evaluated by machining aluminum-silicon alloy material. The experimental results show that the MT-MCD insert presents the best behavior regarding the tool wear. (C) 2012 Elsevier B.V. All rights reserved.
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页码：850 / 859
页数：10
相关论文
共 29 条
[1]   CVD diamond water lubricated tribosystems for high load planar sliding [J].
Abreu, C. S. ;
Salgueiredo, E. ;
Oliveira, F. J. ;
Fernandes, A. J. S. ;
Silva, R. F. ;
Gomes, J. R. .
WEAR, 2008, 265 (7-8) :1023-1028
[2]   Enhanced performance of HFCVD nanocrystalline diamond self-mated tribosystems by plasma pretreatments on silicon nitride substrates [J].
Abreu, C. S. ;
Amaral, M. ;
Oliveira, F. J. ;
Fernandes, A. J. S. ;
Gomes, J. R. ;
Silva, R. F. .
DIAMOND AND RELATED MATERIALS, 2006, 15 (11-12) :2024-2028
[3]   Tribological testing of self-mated nanocrystalline diamond coatings on Si3N4 ceramics [J].
Abreu, C. S. ;
Amaral, M. S. ;
Oliveira, F. J. ;
Tallaire, A. ;
Benedic, F. ;
Syll, O. ;
Cicala, G. ;
Gomes, J. R. ;
Silva, R. F. .
SURFACE & COATINGS TECHNOLOGY, 2006, 200 (22-23) :6235-6239
[4]   Friction and wear performance of HFCVD nanocrystalline diamond coated silicon nitride ceramics [J].
Abreu, C. S. ;
Amaral, M. ;
Fernandes, A. J. S. ;
Oliveira, F. J. ;
Silva, R. F. ;
Gomes, J. R. .
DIAMOND AND RELATED MATERIALS, 2006, 15 (4-8) :739-744
[5]   HFCVD nanocrystalline diamond coatings for tribo-applications in the presence of water [J].
Abreu, C. S. ;
Amaral, M. ;
Oliveira, F. J. ;
Gomes, J. R. ;
Silva, R. F. .
DIAMOND AND RELATED MATERIALS, 2009, 18 (2-3) :271-275
[6]   Grain size effect on self-mated CVD diamond dry tribosystems [J].
Abreu, CS ;
Oliveira, FJ ;
Belmonte, M ;
Fernandes, AJS ;
Silva, RF ;
Gomes, JR .
WEAR, 2005, 259 (1-6) :771-778
[7]   Nano to micrometric HFCVD diamond adhesion strength to Si3N4 [J].
Almeida, F. A. ;
Amaral, M. ;
Oliveira, F. J. ;
Fernandes, A. J. S. ;
Silva, R. F. .
VACUUM, 2007, 81 (11-12) :1443-1447
[8]   Machining behaviour of silicon nitride tools coated with micro-, submicro- and nanometric HFCVD diamond crystallite sizes [J].
Almeida, F. A. ;
Amaral, M. ;
Oliveira, F. J. ;
Silva, R. F. .
DIAMOND AND RELATED MATERIALS, 2006, 15 (11-12) :2029-2034
[9]   Re-sharpenable thick CVD diamond-coated Si3N4 tools for hardmetal turning [J].
Almeida, F. A. ;
Fernandes, A. J. S. ;
Silva, R. F. ;
Oliveira, F. J. .
SURFACE & COATINGS TECHNOLOGY, 2006, 201 (3-4) :1776-1782
[10]   Dry machining of aluminum-silicon alloy using polished CVD diamond-coated cutting tools inserts [J].
Arumugam, PU ;
Malshe, AP ;
Batzer, SA .
SURFACE & COATINGS TECHNOLOGY, 2006, 200 (11) :3399-3403
123