Large-scale ab initio quantum transport simulation of nanosized copper interconnects: the effects of defects and quantum interferences

被引:4
作者
Ye, Meng [1 ,2 ]
Jiang, Xiangwei [1 ]
Li, Shu-Shen [1 ]
Wang, Lin-Wang [2 ]
机构
[1] Chinese Acad Sci, Inst Semicond, State Key Lab Superlattices & Microstruct, Beijing 100083, Peoples R China
[2] Lawrence Berkeley Natl Lab, Mat Sci Div, Berkeley, CA 94720 USA
来源
2019 IEEE INTERNATIONAL ELECTRON DEVICES MEETING (IEDM) | 2019年
关键词
D O I
10.1109/iedm19573.2019.8993549
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
We present a fully ab initio direct quantum transport simulation of nano-interconnect containing a record number of atoms (similar to 5000). Various defects of the nanosized copper (Cu) interconnects, including different wire-neck shapes, twin boundaries, point defects, cobalt (Co) interstitial layers, as well as the thermal effects, are investigated with an aim to reveal the largest effects in such imperfections. We also found that the classical picture of the interconnect resistance, e.g. Matthiessen's rule, might not be valid at nanoscale, due to strong quantum interferences.
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页数:4
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