Large-scale ab initio quantum transport simulation of nanosized copper interconnects: the effects of defects and quantum interferences
被引:4
作者:
Ye, Meng
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机构:
Chinese Acad Sci, Inst Semicond, State Key Lab Superlattices & Microstruct, Beijing 100083, Peoples R China
Lawrence Berkeley Natl Lab, Mat Sci Div, Berkeley, CA 94720 USAChinese Acad Sci, Inst Semicond, State Key Lab Superlattices & Microstruct, Beijing 100083, Peoples R China
Ye, Meng
[1
,2
]
Jiang, Xiangwei
论文数: 0引用数: 0
h-index: 0
机构:
Chinese Acad Sci, Inst Semicond, State Key Lab Superlattices & Microstruct, Beijing 100083, Peoples R ChinaChinese Acad Sci, Inst Semicond, State Key Lab Superlattices & Microstruct, Beijing 100083, Peoples R China
Jiang, Xiangwei
[1
]
Li, Shu-Shen
论文数: 0引用数: 0
h-index: 0
机构:
Chinese Acad Sci, Inst Semicond, State Key Lab Superlattices & Microstruct, Beijing 100083, Peoples R ChinaChinese Acad Sci, Inst Semicond, State Key Lab Superlattices & Microstruct, Beijing 100083, Peoples R China
Li, Shu-Shen
[1
]
Wang, Lin-Wang
论文数: 0引用数: 0
h-index: 0
机构:
Lawrence Berkeley Natl Lab, Mat Sci Div, Berkeley, CA 94720 USAChinese Acad Sci, Inst Semicond, State Key Lab Superlattices & Microstruct, Beijing 100083, Peoples R China
Wang, Lin-Wang
[2
]
机构:
[1] Chinese Acad Sci, Inst Semicond, State Key Lab Superlattices & Microstruct, Beijing 100083, Peoples R China
[2] Lawrence Berkeley Natl Lab, Mat Sci Div, Berkeley, CA 94720 USA
来源:
2019 IEEE INTERNATIONAL ELECTRON DEVICES MEETING (IEDM)
|
2019年
关键词:
D O I:
10.1109/iedm19573.2019.8993549
中图分类号:
TM [电工技术];
TN [电子技术、通信技术];
学科分类号:
0808 ;
0809 ;
摘要:
We present a fully ab initio direct quantum transport simulation of nano-interconnect containing a record number of atoms (similar to 5000). Various defects of the nanosized copper (Cu) interconnects, including different wire-neck shapes, twin boundaries, point defects, cobalt (Co) interstitial layers, as well as the thermal effects, are investigated with an aim to reveal the largest effects in such imperfections. We also found that the classical picture of the interconnect resistance, e.g. Matthiessen's rule, might not be valid at nanoscale, due to strong quantum interferences.
机构:
Chinese Acad Sci, Supercomp Ctr, Comp Network Informat Ctr, Beijing, Peoples R China
Univ Chinese Acad Sci, Beijing, Peoples R ChinaChinese Acad Sci, Supercomp Ctr, Comp Network Informat Ctr, Beijing, Peoples R China
Jia, Weile
;
Wang, Jue
论文数: 0引用数: 0
h-index: 0
机构:
Chinese Acad Sci, Supercomp Ctr, Comp Network Informat Ctr, Beijing, Peoples R ChinaChinese Acad Sci, Supercomp Ctr, Comp Network Informat Ctr, Beijing, Peoples R China
Wang, Jue
;
Chi, Xuebin
论文数: 0引用数: 0
h-index: 0
机构:
Chinese Acad Sci, Supercomp Ctr, Comp Network Informat Ctr, Beijing, Peoples R ChinaChinese Acad Sci, Supercomp Ctr, Comp Network Informat Ctr, Beijing, Peoples R China
Chi, Xuebin
;
Wang, Lin-Wang
论文数: 0引用数: 0
h-index: 0
机构:
Lawrence Berkeley Natl Lab, Div Mat Sci, Berkeley, CA USAChinese Acad Sci, Supercomp Ctr, Comp Network Informat Ctr, Beijing, Peoples R China
机构:
Univ Calif Berkeley, Lawrence Berkeley Natl Lab, Div Mat Sci, Berkeley, CA 94720 USAUniv Calif Berkeley, Lawrence Berkeley Natl Lab, Div Mat Sci, Berkeley, CA 94720 USA
机构:
Chinese Acad Sci, Supercomp Ctr, Comp Network Informat Ctr, Beijing, Peoples R China
Univ Chinese Acad Sci, Beijing, Peoples R ChinaChinese Acad Sci, Supercomp Ctr, Comp Network Informat Ctr, Beijing, Peoples R China
Jia, Weile
;
Wang, Jue
论文数: 0引用数: 0
h-index: 0
机构:
Chinese Acad Sci, Supercomp Ctr, Comp Network Informat Ctr, Beijing, Peoples R ChinaChinese Acad Sci, Supercomp Ctr, Comp Network Informat Ctr, Beijing, Peoples R China
Wang, Jue
;
Chi, Xuebin
论文数: 0引用数: 0
h-index: 0
机构:
Chinese Acad Sci, Supercomp Ctr, Comp Network Informat Ctr, Beijing, Peoples R ChinaChinese Acad Sci, Supercomp Ctr, Comp Network Informat Ctr, Beijing, Peoples R China
Chi, Xuebin
;
Wang, Lin-Wang
论文数: 0引用数: 0
h-index: 0
机构:
Lawrence Berkeley Natl Lab, Div Mat Sci, Berkeley, CA USAChinese Acad Sci, Supercomp Ctr, Comp Network Informat Ctr, Beijing, Peoples R China
机构:
Univ Calif Berkeley, Lawrence Berkeley Natl Lab, Div Mat Sci, Berkeley, CA 94720 USAUniv Calif Berkeley, Lawrence Berkeley Natl Lab, Div Mat Sci, Berkeley, CA 94720 USA