Plasma immersion ion implantation of polyethylene

被引：33

作者：

Kondyurin, A

Karmanov, V

Guenzel, R

机构：

[1] Russian Acad Sci, Inst Tech Chem, Perm 614000, Russia

[2] Forschungszentrum Rossendorf EV, Inst Ion Beam Phys & Mat Res, D-01314 Dresden, Germany

来源：

VACUUM | 2001年 / 64卷 / 02期

关键词：

D O I：

10.1016/S0042-207X(01)00381-5

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Plasma immersions ion implantation of nitrogen ions with an energy of 20 keV at 10(13)-10(16) ion/cm(2) doses was applied to polyethylene films. The structure changes in surface layers were analysed by IR ATR spectra, wetting measurements and the calculation of surface energy, surface morphology measurements and UV spectra with the calculation of energetic split width. The processes of oxidation and carbonisation on the surface layer of polyethylene were observed. It was shown that plasma immersion implantation leads to lower structure changes of polyethylene than pulse ion beam implantation at the same conditions. (C) 2001 Elsevier Science Ltd. All rights reserved.

引用

页码：105 / 111

页数：7

共 19 条

[1]

BROUN IG, 1994, J VAC SCI TECHNOL B, V12, P823

[2] Sheath dynamics in plasma immersion ion implantation [J].