Multi-Beam Interference Advances and Applications: Nano-Electronics, Photonic Crystals, Metamaterials, Subwavelength Structures, Optical Trapping, and Biomedical Structures

被引：91

作者：

Burrow, Guy M. ^{[1
]}

Gaylord, Thomas K. ^{[1
]}

机构：

[1] Georgia Inst Technol, Sch Elect & Comp Engn, Atlanta, GA 30332 USA

来源：

MICROMACHINES | 2011年 / 2卷 / 02期

基金：

美国国家科学基金会;

关键词：

multi-beam interference; interference lithography; nano-electronics; photonic crystals; metamaterials; subwavelength structures; optical trapping; biomedical structures; DIFFRACTIVE BEAM SPLITTER; 3-D HOLOGRAPHIC LITHOGRAPHY; SURFACE-RELIEF GRATINGS; 3 NONCOPLANAR BEAMS; 14 BRAVAIS LATTICES; LASER INTERFERENCE; BAND-GAP; LARGE-AREA; INTERFEROMETRIC LITHOGRAPHY; PERIODIC STRUCTURES;

D O I：

10.3390/mi2020221

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

Research in recent years has greatly advanced the understanding and capabilities of multi-beam interference (MBI). With this technology it is now possible to generate a wide range of one-, two-, and three-dimensional periodic optical-intensity distributions at the micro-and nano-scale over a large length/area/volume. These patterns may be used directly or recorded in photo-sensitive materials using multi-beam interference lithography (MBIL) to accomplish subwavelength patterning. Advances in MBI and MBIL and a very wide range of applications areas including nano-electronics, photonic crystals, metamaterials, subwavelength structures, optical trapping, and biomedical structures are reviewed and put into a unified perspective.

引用

页码：221 / 257

页数：37

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