Effects of Ion Bombardment on Magnetostrictive Properties of Giant Magnetostrictive Thin Films

被引：5
|
作者：
Makita, Koji [1 ]
Tanakamaru, Tempei [1 ]
Takeuchi, Mitsuaki [1 ]
Uchida, Hirohisa [1 ]
Matsumura, Yoshihito [1 ]
机构：
[1] Tokai Univ, Grad Sch Engn, Dept Appl Sci, Hiratsuka, Kanagawa 2591292, Japan
来源：
JOURNAL OF THE JAPAN INSTITUTE OF METALS | 2008年 / 72卷 / 09期
关键词：
giant magnetostriction; thin film; ion bombardment; internal stress; magnetostrictive susceptibility;
D O I：
10.2320/jinstmet.72.714
中图分类号：
TF [冶金工业];
学科分类号：
0806 ;
摘要：
Sm27Fe73 films fabricated by a magnetron sputtering were studied with respect to magnetism and plasma physics. A new parameter 'P-i' was proposed to evaluate effects of ion bombardment for a magnetostriction. The P-i is represented as P-i = (i/a).(2m(i)E(i))(1/2), here i is ion flux, a is material flux, m(i) is the ion mass and E-i is the ion energy. The plasma parameter was determined by Langmuir probes. As a result, the inplane magnetic anisotropy was enhanced by increasing of the P-i. Increase of the P-i induced an increase of magnetostrictive susceptibility and a decrease of saturated magnetstriction. This is probably caused by a change of internal stress accompanied with the P-i.
引用
收藏
页码：714 / 718
页数：5
相关论文
共 50 条
  • [1] Effect of Ion Bombardment on Magnetostrictive Properties of Giant Magnetostrictive Thin Films
    Makita, Koji
    Takeuchi, Mitsuaki
    Matsumura, Yoshihito
    Uchida, Hirohisa
    Sato, Masashi
    ACTUATOR 08, CONFERENCE PROCEEDINGS, 2008, : 730 - +
  • [2] Ion Bombardment Effects on Magnetostrictive Thin Films
    Shinohara, Y.
    Makita, K.
    Asaka, T.
    Matsumura, Y.
    ACTUATOR 10, CONFERENCE PROCEEDINGS, 2010, : 736 - 738
  • [3] Application-related properties of giant magnetostrictive thin films
    Lim, SH
    Kim, HJ
    Na, SM
    Suh, SJ
    JOURNAL OF MAGNETISM AND MAGNETIC MATERIALS, 2002, 239 (1-3) : 546 - 550
  • [4] Progress in thin films of giant magnetostrictive alloys
    Uchida, H
    Matsumura, Y
    Uchida, H
    Kaneko, H
    JOURNAL OF MAGNETISM AND MAGNETIC MATERIALS, 2002, 239 (1-3) : 540 - 545
  • [5] Microactuators driven by giant magnetostrictive thin films
    Lim, SH
    Choi, YS
    Han, SH
    Kim, HJ
    Moon, S
    Kang, HK
    Oh, MH
    Ahn, CH
    PROCEEDINGS OF THE FIFTH INTERNATIONAL SYMPOSIUM ON MAGNETIC MATERIALS, PROCESSES, AND DEVICES: APPLICATIONS TO STORAGE AND MICROELECTROMECHANICAL SYSTEMS (MEMS), 1999, 98 (20): : 327 - 341
  • [6] Optical switch driven by giant magnetostrictive thin films
    Moon, S
    Lim, SH
    Lee, SB
    Kang, HK
    Kim, MC
    Han, SH
    Oh, MH
    DESIGN, TEST, AND MICROFABRICATION OF MEMS AND MOEMS, PTS 1 AND 2, 1999, 3680 : 854 - 862
  • [7] Enhancement of magnetostrictive properties of Galfenol thin films
    Nivedita, Lalitha Raveendran
    Manivel, Palanisamy
    Pandian, Ramanathaswamy
    Murugesan, S.
    Morley, Nicola Ann
    Asokan, K.
    Kumar, Ramasamy Thangavelu Rajendra
    JOURNAL OF MAGNETISM AND MAGNETIC MATERIALS, 2018, 451 : 300 - 304
  • [8] MAGNETIC-PROPERTIES OF GIANT MAGNETOSTRICTIVE TBDYFE FILMS
    SCHATZ, F
    HIRSCHER, M
    FLIK, G
    KRONMULLER, H
    PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 1993, 137 (01): : 197 - 205
  • [9] Giant magnetostrictive thin films for applications in microelectromechanical systems (invited)
    Ludwig, A
    Quandt, E
    JOURNAL OF APPLIED PHYSICS, 2000, 87 (09) : 4691 - 4695
  • [10] Magnetic properties of Tb-Fe giant magnetostrictive thin films by oblique deposition
    Yamaki, TO
    Uchida, H
    Matsumura, Y
    SMART MATERIALS II, 2002, 4934 : 323 - 331
12345