Indirect super-resolved microscopy: Aberration compensation and image reconstruction of tilt azimuth data

被引:0
作者
Kirkland, AI [1 ]
Saxton, WO [1 ]
Meyer, RR [1 ]
机构
[1] Univ Cambridge, Dept Chem, Cambridge CB2 1EW, England
来源
ELECTRON | 1998年
关键词
D O I
暂无
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
Recent improvements in instrumentation and image-handling techniques mean that indirect methods for improving the resolution attainable in the TEM either via image reconstruction of focal or beam-tilt series or via holographic methods are now realising the promise they have long offered. These techniques simultaneously recover both the phase and the modulus of the specimen exit plane wave function, and extend the interpretable resolution beyond the normal limit. In the particular method described here, a series of images is recorded with different tilts of the incident illumination, and from the differently aberrated images the specimen wave function is recovered with a near-isotropic resolution almost double that of the conventional Scherzer limit. We present super-resolved images of a large unit-cell block oxide which were obtained in this way. The practical realisation of such reconstructions has required the solution of two substantial technical problems of image analysis: a posteriori determination of the objective lens aberrations, including the actual beam tilt, defocus, twofold and threefold astigmatism; and mutual registration of the differently aberrated images.
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页码:426 / 436
页数:3
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