Fabrication and characterization of micromachined accelerometers based on PZT thin films

被引：0
|
作者：
Baborowski, J [1 ]
Hediger, S [1 ]
Muralt, P [1 ]
Wuethrich, C [1 ]
机构：
[1] Swiss Fed Inst Technol, EPFL, Ceram Lab, CH-1015 Lausanne, Switzerland
来源：
FERROELECTRICS | 1999年 / 224卷 / 1-4期
关键词：
accelerometers; thin films; micromachining; lead zirconate titanate;
D O I：
暂无
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
In this paper the simple accelerometers based on PZT thin films were developed and characterized. The functions of seismic mass and spring are given by a boss loaded cantilever structure. The strain of the cantilever is detected by a Pb(Zr,Ti)O-3 thin film. A 2 mm long and 0.8 mm wide cantilever yielded a response of 0.6 mV/g In the frequency interval between I and 600 Hz. With Delta f = 600Hz a limit of about 1mg* at 1Hz, and less above this frequency, was observed. The response predicted by the analytical model is close to the actual response of the device. A working miniaturized accelerometer prototype could be thus demonstrated.
引用
收藏
页码：711 / 718
页数：8
相关论文
共 50 条
  • [31] Deposition and characterization of photoconductive PZT thin films
    Northern Illinois Univ, DeKalb, United States
    J Electrochem Soc, 6 (1957-1960):
  • [32] Preparation and Characterization of Rhombohedral PZT Thin Films
    Foeth, M.
    Sfera, A.
    Triscone, J.-M.
    Fischer, O.
    Helvetica Physica Acta, 1996, 69 (01):
  • [33] Structural and ferroelectric characterization of PZT thin films
    Yang, Y
    Chen, ZM
    Zhao, GY
    Zhang, WH
    INTERNATIONAL JOURNAL OF MODERN PHYSICS B, 2002, 16 (28-29): : 4460 - 4464
  • [34] Fabrication and characterization of PZT thin film ultrasonic devices
    Chang, CC
    Chen, KH
    JOURNAL OF THE CHINESE INSTITUTE OF ENGINEERS, 2000, 23 (02) : 179 - 184
  • [35] Fabrication And Characterization Of SMA/PZT Thin Film Heterostructures
    Choudhary, Nitin
    Kaur, Davinder
    INTERNATIONAL CONFERENCE ON PHYSICS OF EMERGING FUNCTIONAL MATERIALS (PEFM-2010), 2010, 1313 : 90 - +
  • [36] Fabrication and characterization of PZT thick films for sensing and actuation
    Jang, Ling-Sheng
    Kuo, Kuo-Ching
    SENSORS, 2007, 7 (04) : 493 - 507
  • [37] Single-grained PZT thin films for high level fram integration - Fabrication and characterization
    Lee, JS
    Lee, BI
    Joo, SK
    INTEGRATED FERROELECTRICS, 2000, 31 (1-4) : 149 - 162
  • [38] Fabrication and Characterization of Lead Zirconate Titanate (PZT) Thin Films by Sol-Gel Technique
    Rahman, M. F.
    Miglioli, L.
    INTERNATIONAL JOURNAL OF NANOSCIENCE, 2016, 15 (03)
  • [39] Fabrication of (100) orientated PZT thin films for MEMS applications
    Zhao, HJ
    Ren, TL
    Liu, JS
    Liu, LT
    Li, ZJ
    INTEGRATED FERROELECTRICS, 2002, 46 : 79 - 86
  • [40] Fabrication of single crystal PZT thin films on glass substrates
    Terada, Kenichiro
    Suzuki, Takaaki
    Kanno, Isaku
    Kotera, Hidetoshi
    VACUUM, 2007, 81 (05) : 571 - 578
12345