Fabrication and characterization of micromachined accelerometers based on PZT thin films

被引：0
|
作者：
Baborowski, J [1 ]
Hediger, S [1 ]
Muralt, P [1 ]
Wuethrich, C [1 ]
机构：
[1] Swiss Fed Inst Technol, EPFL, Ceram Lab, CH-1015 Lausanne, Switzerland
来源：
FERROELECTRICS | 1999年 / 224卷 / 1-4期
关键词：
accelerometers; thin films; micromachining; lead zirconate titanate;
D O I：
暂无
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
In this paper the simple accelerometers based on PZT thin films were developed and characterized. The functions of seismic mass and spring are given by a boss loaded cantilever structure. The strain of the cantilever is detected by a Pb(Zr,Ti)O-3 thin film. A 2 mm long and 0.8 mm wide cantilever yielded a response of 0.6 mV/g In the frequency interval between I and 600 Hz. With Delta f = 600Hz a limit of about 1mg* at 1Hz, and less above this frequency, was observed. The response predicted by the analytical model is close to the actual response of the device. A working miniaturized accelerometer prototype could be thus demonstrated.
引用
收藏
页码：711 / 718
页数：8
相关论文
共 50 条
  • [21] Characterization of PZT thin films for micromotors
    Muralt, P
    Kholkin, A
    Kohli, M
    Maeder, T
    Setter, N
    MICROELECTRONIC ENGINEERING, 1995, 29 (1-4) : 67 - 70
  • [22] Preparation and characterization of PZT thin films
    Bose, A.
    Sreemany, M.
    Halder, S. K.
    Bhattacharyya, D. K.
    Sen, Suchitra
    SMART DEVICES: MODELING OF MATERIAL SYSTEMS, 2008, 1029 : 279 - +
  • [23] GROWTH AND CHARACTERIZATION OF PZT THIN FILMS
    Bao, Daqun
    Zhang, Yi
    Guo, Hang
    MicroNano2008-2nd International Conference on Integration and Commercialization of Micro and Nanosystems, Proceedings, 2008, : 733 - 737
  • [24] Fabrication and Characterization of PZT/CuO Thin Film
    Sreesattabud, Tharathip
    Gibbons, Brady J.
    Watcharapasorn, Anucha
    Naksata, Manoch
    Jiansirisomboon, Sukanda
    INTEGRATED FERROELECTRICS, 2013, 148 (01) : 102 - 109
  • [25] Fabrication and characterization of ternary compound PMnN-PZT thin films on silicon substrates
    Zhang, Tao
    Zhang, Shu-Yi
    Li, Min
    Zhou, Sheng-Nan
    Sun, Bin
    Gongneng Cailiao/Journal of Functional Materials, 2012, 43 (13): : 1759 - 1761
  • [26] PZT thin films for low voltage actuation: Fabrication and characterization of the transverse piezoelectric coefficient
    Deshpande, Mandar
    Saggere, Laxman
    SENSORS AND ACTUATORS A-PHYSICAL, 2007, 135 (02) : 690 - 699
  • [27] Fabrication of High Piezoelectric PZT-based Thin Films by Sputtering Method
    Zhang, Tao
    Ma, Hongwei
    Li, Min
    Zhao, Shenggui
    Liu, Ping
    2012 WORLD AUTOMATION CONGRESS (WAC), 2012,
  • [28] Fabrication and properties of silicon-based PZT thin films for MFSFET applications
    Ren, TL
    Shao, TQ
    Zhang, WQ
    Li, CX
    Liu, JS
    Liu, LT
    Zhu, J
    Li, ZJ
    MICROELECTRONIC ENGINEERING, 2003, 66 (1-4) : 554 - 560
  • [29] Sputtering of PZT thin films for surface micromachined IR-detector arrays
    Bruchhaus, R
    Pitzer, D
    Primig, R
    Schreiter, M
    Wersing, W
    INTEGRATED FERROELECTRICS, 1999, 25 (1-4) : 341 - 351
  • [30] Preparation and characterization of rhombohedral PZT thin films
    Foeth, M
    Sfera, A
    Triscone, JM
    Fischer, O
    Stadelmann, P
    Buffat, PA
    HELVETICA PHYSICA ACTA, 1996, 69 : 3 - 4
12345