Fabrication and characterization of micromachined accelerometers based on PZT thin films

被引：0
|
作者：
Baborowski, J [1 ]
Hediger, S [1 ]
Muralt, P [1 ]
Wuethrich, C [1 ]
机构：
[1] Swiss Fed Inst Technol, EPFL, Ceram Lab, CH-1015 Lausanne, Switzerland
来源：
FERROELECTRICS | 1999年 / 224卷 / 1-4期
关键词：
accelerometers; thin films; micromachining; lead zirconate titanate;
D O I：
暂无
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
In this paper the simple accelerometers based on PZT thin films were developed and characterized. The functions of seismic mass and spring are given by a boss loaded cantilever structure. The strain of the cantilever is detected by a Pb(Zr,Ti)O-3 thin film. A 2 mm long and 0.8 mm wide cantilever yielded a response of 0.6 mV/g In the frequency interval between I and 600 Hz. With Delta f = 600Hz a limit of about 1mg* at 1Hz, and less above this frequency, was observed. The response predicted by the analytical model is close to the actual response of the device. A working miniaturized accelerometer prototype could be thus demonstrated.
引用
收藏
页码：711 / 718
页数：8
相关论文
共 50 条
  • [1] Fabrication and characterization of PZT thin films for micromotors
    Muralt, P
    Kholkin, A
    Kohli, M
    Maeder, T
    Brooks, KG
    Luthier, R
    INTEGRATED FERROELECTRICS, 1995, 11 (1-4) : 213 - 220
  • [2] Design, Fabrication, and Characterization of Bimorph Micromachined Harvester With Asymmetrical PZT Films
    Dong, Xiaoxue
    Yi, Zhiran
    Kong, Lingchao
    Tian, Yingwei
    LiuP, Jingquan
    Yang, Bin
    JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2019, 28 (04) : 700 - 706
  • [3] FABRICATION AND CHARACTERIZATION OF SILICON MICROMACHINED THRESHOLD ACCELEROMETERS
    LOKE, Y
    MCKINNON, GH
    BRETT, MJ
    SENSORS AND ACTUATORS A-PHYSICAL, 1991, 29 (03) : 235 - 240
  • [4] Piezoelectric micromachined ultrasonic transducers based on PZT thin films
    Muralt, P
    Ledermann, N
    Baborowski, J
    Barzegar, A
    Gentil, S
    Belgacem, B
    Petitgrand, S
    Bosseboeuf, A
    Setter, N
    IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL, 2005, 52 (12) : 2276 - 2288
  • [5] Micromachined piezoelectric force sensors based on PZT thin films
    Lee, CK
    Itoh, T
    Suga, T
    IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL, 1996, 43 (04) : 553 - 559
  • [6] Fabrication of nanostructured PZT ferroelectric thin films and their characterization
    Zhu, Xin-Hua
    Song, Ye
    Hang, Qi-Ming
    Zhu, Jian-Min
    Zhou, Shun-Hua
    Liu, Zhi-Guo
    Gongneng Cailiao/Journal of Functional Materials, 2010, 41 (11): : 1959 - 1962
  • [7] Fabrication and characterization of piezoelectric micromachined ultrasonic transducers with thick composite PZT films
    Wang, ZH
    Zhu, NG
    Zhu, H
    Miao, JM
    Chao, C
    Zhao, CL
    Tan, OK
    IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL, 2005, 52 (12) : 2289 - 2297
  • [8] Piezoelectric micromachined transducers (pMUT's) based on PZT thin films
    Baborowski, J
    Ledermann, N
    Muralt, P
    2002 IEEE ULTRASONICS SYMPOSIUM PROCEEDINGS, VOLS 1 AND 2, 2002, : 1051 - 1054
  • [9] Fabrication and characterization of PZT thin-film on bulk micromachined Si motion detectors
    Garino, TJ
    Tuttle, BA
    Laguna, G
    Clem, P
    FERROELECTRIC THIN FILMS VII, 1999, 541 : 629 - 634
  • [10] Fabrication and characterization of lead silicate doped PZT thin films
    Karasawa, J
    Hamada, Y
    Ohashi, K
    Kijima, T
    Natori, E
    Shimoda, T
    FERROELECTRIC THIN FILMS XI, 2003, 748 : 123 - 128
12345