Fabrication and characterization of micromachined accelerometers based on PZT thin films

被引：0
作者：
Baborowski, J [1 ]
Hediger, S [1 ]
Muralt, P [1 ]
Wuethrich, C [1 ]
机构：
[1] Swiss Fed Inst Technol, EPFL, Ceram Lab, CH-1015 Lausanne, Switzerland
来源：
FERROELECTRICS | 1999年 / 224卷 / 1-4期
关键词：
accelerometers; thin films; micromachining; lead zirconate titanate;
D O I：
暂无
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
In this paper the simple accelerometers based on PZT thin films were developed and characterized. The functions of seismic mass and spring are given by a boss loaded cantilever structure. The strain of the cantilever is detected by a Pb(Zr,Ti)O-3 thin film. A 2 mm long and 0.8 mm wide cantilever yielded a response of 0.6 mV/g In the frequency interval between I and 600 Hz. With Delta f = 600Hz a limit of about 1mg* at 1Hz, and less above this frequency, was observed. The response predicted by the analytical model is close to the actual response of the device. A working miniaturized accelerometer prototype could be thus demonstrated.
引用
收藏
页码：711 / 718
页数：8
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