Tilt-ellipsometry of object surface by specular reflection for three-dimensional shape measurement

被引：11
|
作者：
Tsuru, Toshihide [1 ]
机构：
[1] Yamagata Univ, Fac Educ Art & Sci, Yamagata 9908560, Japan
来源：
OPTICS EXPRESS | 2013年 / 21卷 / 05期
基金：
日本学术振兴会;
关键词：
TRANSPARENT OBJECTS; POLARIZATION; ORIENTATIONS; RECOVERY;
D O I：
10.1364/OE.21.006625
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
Ellipsometry by specular reflection has been reworked as a precise surface normal vector detection method for the geometrical shape study of a glossy object. When the object is illuminated by circularly polarized light, the surface normal vector defines the shape of the reflection polarization ellipse; the azimuth and ellipticity are determined by the angle of the incident plane and the angle of incidence, respectively. The tilt-ellipsometry principle of tilt detection is demonstrated experimentally with a metallic polygon and a cube sample. (c) 2013 Optical Society of America
引用
收藏
页码：6625 / 6632
页数：8
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