135-GHz Micromachined On-Chip Antenna and Antenna Array

被引：52

作者：

Chu, Hui ^{[1
,2
]}

Guo, Yong-Xin ^{[1
]}

Lim, Teck-Guan ^{[3
]}

Khoo, Yee Mong ^{[3
]}

Shi, Xiangquan ^{[2
]}

机构：

[1] Natl Univ Singapore, Dept Elect & Comp Engn, Singapore 117576, Singapore

[2] Nanjing Univ Sci & Technol, Sch Elect Engn & Optoelect Tech, Nanjing 210094, Jiangsu, Peoples R China

[3] ASTAR, Inst Microelect, Singapore 117685, Singapore

来源：

IEEE TRANSACTIONS ON ANTENNAS AND PROPAGATION | 2012年 / 60卷 / 10期

关键词：

Micromachining; on-chip antennas; silicon antennas; sub-terahertz antennas; YAGI ANTENNA; CMOS;

D O I：

10.1109/TAP.2012.2209855

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper presents the design, fabrication and "on-wafer" characterization of multi-membrane-supported and polymer-cavity-backed monopole antenna and 2 x 1 patch antenna array operating in the 135-GHz frequency range. The designs were fabricated on two-layer benzocyclobutene (BCB) material membrane obtained by micromachining of the low resistivity silicon. The silicon material is removed underneath the monopole antenna to produce a cavity surrounded by metal and filled with polymer. This polymer filled cavity provides a better support to the membrane than conventional air cavity which is extremely important for practical applications. In the meantime, the higher synthesized effective dielectric permittivity of the BCB-polymer mixed region than BCB-air mixed one provides the possibility for compact antenna array designs. The proposed monopole antenna shows a measured impedance bandwidth from 124 to 136 GHz for vertical bar S11 vertical bar less than -10 dB and maximum measured gain of 6.74 dBi at 131 GHz; while the 2 x 1 patch antenna array achieved a measured impedance bandwidth from 126.5 to 138 GHz for vertical bar S11 vertical bar less than -10 dB and maximum measured gain of 8.66 dBi at 130 GHz.

引用

页码：4582 / 4588

页数：7

共 32 条

[1] Millimeter-wave antenna measurement [J].

Akkermans, J. A. G. ;

van Dijk, R. ;

Herben, M. H. A. J. .

2007 EUROPEAN MICROWAVE CONFERENCE, VOLS 1-4, 2007, :83-+

[2]

[Anonymous], PROB SEL GUID HIGH F

[3] 94-GHz Log-Periodic Antenna on GaAs Substrate Using Air-Bridge Structure [J].

Baek, Yong-Hyun ;

Truong, Le Huu ;

Park, Sun-Woo ;

Lee, Sang-Jin ;

Chae, Yeon-Sik ;

Rhee, Eung-Ho ;

Park, Hyun-Chang ;

Rhee, Jin-Koo .

IEEE ANTENNAS AND WIRELESS PROPAGATION LETTERS, 2009, 8 :909-911

[4]

Beer S., 2011, 2011 5th European Conference on Antennas and Propagation (EuCAP), P1903

[5] A 0.3mm2 miniaturized X-band on-chip slot antenna in 0.13 μm CMOS [J].

Behdad, Nader ;

Shi, Dan ;

Hong, Wonbin ;

Sarabandi, Karnal ;

Flynn, Michael P. .

2007 IEEE RADIO FREQUENCY INTEGRATED CIRCUITS (RFIC) SYMPOSIUM, DIGEST OF PAPERS, 2007, :441-+

[6] Intra-chip wireless interconnect for clock distribution implemented with integrated antennas, receivers, and transmitters [J].

Floyd, BA ;

Hung, CM ;

O, KK .

IEEE JOURNAL OF SOLID-STATE CIRCUITS, 2002, 37 (05) :543-552

[7] A 94-GHz aperture-coupled micromachined microstrip antenna [J].

Gauthier, GP ;

Raskin, JP ;

Katehi, LPB ;

Rebeiz, GM .

IEEE TRANSACTIONS ON ANTENNAS AND PROPAGATION, 1999, 47 (12) :1761-1766

[8] On-Chip Integrated Antenna Structures in CMOS for 60 GHz WPAN Systems [J].

Gutierrez, Felix, Jr. ;

Agarwal, Shatam ;

Parrish, Kristen ;

Rappaport, Theodore S. .

IEEE JOURNAL ON SELECTED AREAS IN COMMUNICATIONS, 2009, 27 (08) :1367-1378

[9] 130-GHz On-Chip Meander Slot Antennas With Stacked Dielectric Resonators in Standard CMOS Technology [J].

Hou, Debin ;

Xiong, Yong-Zhong ;

Goh, Wang-Ling ;

Hu, Sanming ;

Hong, Wei ;

Madihian, Mohammad .

IEEE TRANSACTIONS ON ANTENNAS AND PROPAGATION, 2012, 60 (09) :4102-4109

[10] A 60-GHz millimeter-wave CPW-fed Yagi antenna fabricated by using 0.18-μm CMOS technology [J].

Hsu, Shun-Sheng ;

Wei, Kuo-Chih ;

Hsu, Cheng-Ying ;

Ru-Chuang, Huey .

IEEE ELECTRON DEVICE LETTERS, 2008, 29 (06) :625-627

← 1 2 3 4 →