共 16 条
[2]
A MONTE-CARLO COMPUTER-PROGRAM FOR THE TRANSPORT OF ENERGETIC IONS IN AMORPHOUS TARGETS
[J].
NUCLEAR INSTRUMENTS & METHODS,
1980, 174 (1-2)
:257-269
[5]
DUETCHMAN AH, 1989, C P ASM OH, P29
[6]
Electronic structure of hydrogenated carbon nitride films
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A,
1998, 16 (05)
:2941-2949
[7]
TECHNOLOGY OF ION-BEAM SOURCES USED IN SPUTTERING
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY,
1978, 15 (02)
:272-276