Improved chromatic confocal displacement-sensor based on a spatial-bandpass-filter and an X-shaped fiber-coupler

被引：47

作者：

Bai, Jiao ^{[1
,2
]}

Li, Xinghui ^{[1
]}

Zhou, Qian ^{[1
]}

Ni, Kai ^{[1
]}

Wang, Xiaohao ^{[1
]}

机构：

[1] Tsinghua Univ, Grad Sch Shenzhen, Div Adv Mfg, Tsinghua Campus, Shenzhen 518055, Peoples R China

[2] China Acad Engn Phys, Inst Mat, Mianyang 621907, Peoples R China

来源：

OPTICS EXPRESS | 2019年 / 27卷 / 08期

基金：

中国国家自然科学基金;

关键词：

MICROSCOPY; APERTURE;

D O I：

10.1364/OE.27.010961

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

To improve the positioning capabilities of a chromatic confocal displacement measurement system, we introduce a super-resolving pupil filtering element (referred to as spatial-bandpass-filter), an X-shaped fiber-coupler, and a modified peak-extraction algorithm. The spatial-bandpass-filer decreases the spherical aberration of conventional refractive lenses and transmission loss, without changing the dispersion range. The new optical design minimizes the effect of light-source-variation as well as reflectance-variation of the sample surface against the wavelength by adding a reference arm with an X-shaped fiber-coupler and normalization algorithm. This enables rapid re-purposing to obtain data for crosstalk, reference and measurement signals. A prototype setup was built and the experimental results show that the new chromatic dispersion system can reach a position stability of +/- 0.36 mu m using a commercial cost-effective white-light source. It reaches an axial displacement resolution of up to 1 mu m and a peak-fit error below +/- 0.2% for a range of 1.05 mm. (C) 2019 Optical Society of America under the terms of the OSA Open Access Publishing Agreement

引用

页码：10961 / 10973

页数：13

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