Near-Field Microwave Techniques for Micro- and Nano-Scale Characterization in Materials Science

被引：0

作者：

Marcelli, Romolo ^{[1
]}

Lucibello, Andrea ^{[1
]}

Capoccia, Giovanni ^{[1
]}

Proietti, Emanuela ^{[1
]}

Sardi, Giovanni Maria ^{[1
]}

Christopher, Hardly Joseph ^{[1
]}

Michalas, Loukas ^{[1
]}

Bartolucci, Giancarlo ^{[1
,2
]}

Kienberger, Ferry ^{[3
]}

Gramse, Georg ^{[4
]}

Kasper, Manuel ^{[3
]}

机构：

[1] CNR, IMM, Via Fosso del Cavaliere 100, I-00133 Rome, Italy

[2] Univ Roma Tor Vergata, Via Politecn 1, I-00133 Rome, Italy

[3] Keysight Technol Austria GmbH, Keysight Labs, Gruberstr 40, A-4020 Linz, Austria

[4] Johannes Kepler Univ Linz, Inst Biophys, Gruberstr 40, A-4020 Linz, Austria

来源：

2017 INTERNATIONAL SEMICONDUCTOR CONFERENCE (CAS), 40TH EDITION | 2017年

关键词：

Near-Field; Microwave Microscopy; Materials Science; Dielectric Materials; Magnetism; NANOSCALE CHARACTERIZATION; GIGAHERTZ FREQUENCIES; ELECTRIC PERMITTIVITY; SEMICONDUCTORS;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

In this paper, the basic principles of Near-Field Microscopy will be reviewed with focus on the micro-and nano-scale resolution configurations for material science measurements. Results on doping profile, dielectric and magnetic properties will be presented, with details on the calibration protocols needed for quantitative estimation of the dielectric constant and of the permeability.

引用

页码：29 / 36

页数：8

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