Linear imaging theory for differential phase contrast and other phase imaging modes in scanning transmission electron microscopy

被引：8

作者：

Seki, Takehito ^{[1
,2
]}

Khare, Kushagra ^{[3
]}

Murakami, Yoshiki O. ^{[1
]}

Toyama, Satoko ^{[1
]}

Sanchez-Santolino, Gabriel ^{[1
,7
,8
]}

Sasaki, Hirokazu ^{[4
]}

Findlay, Scott D. ^{[3
]}

Petersen, Timothy C. ^{[5
]}

Ikuhara, Yuichi ^{[1
,6
]}

Shibata, Naoya ^{[1
,6
]}

机构：

[1] Univ Tokyo, Sch Engn, Inst Engn Innovat, Tokyo 1138656, Japan

[2] Japan Sci & Technol Agcy, PRESTO, Kawaguchi, Saitama 3320012, Japan

[3] Monash Univ, Sch Phys & Astron, Clayton, Vic 3800, Australia

[4] Furukawa Elect Corp Ltd, Anal Technol Ctr, Yokohama, Kanagawa 2200073, Japan

[5] Monash Univ, Monash Ctr Electron Microscopy, Clayton, Vic 3800, Australia

[6] Japan Fine Ceram Ctr, Nanostruct Res Lab, Atsuta Ku, Nagoya, Aichi 4568587, Japan

[7] Univ Complutense Madrid, Dept Fis Mat, Madrid 28040, Spain

[8] Univ Complutense Madrid, Inst Pluridisciplinar, Madrid 28040, Spain

来源：

ULTRAMICROSCOPY | 2022年 / 240卷

基金：

澳大利亚研究理事会;

关键词：

STEM; DETECTOR; FIELDS; RECONSTRUCTION; SPECIMENS; VISUALIZATION; SAMPLES;

D O I：

10.1016/j.ultramic.2022.113580

中图分类号：

TH742 [显微镜];

学科分类号：

摘要：

We propose a linear imaging theory for differential phase contrast under the weak-phase-weak-amplitude object approximation. Contrast transfer functions are defined for thin and thick weak objects, and they successfully describe several imaging characteristics of differential phase contrast. We discuss the defocus dependence of the contrast for several examples: atomic resolution, a p-n junction, a heterointerface, and grain boundaries. Understanding the imaging characteristics helps in adjusting aberrations in DPC STEM.

引用

页数：11

共 50 条

[1] Toward quantitative electromagnetic field imaging by differential-phase-contrast scanning transmission electron microscopy
Seki, Takehito
Ikuhara, Yuichi
Shibata, Naoya
MICROSCOPY, 2021, 70 (01) : 148 - 160
[2] Phase contrast scanning transmission electron microscopy imaging of light and heavy atoms at the limit of contrast and resolution
Yucelen, Emrah
Lazic, Ivan
Bosch, Eric G. T.
SCIENTIFIC REPORTS, 2018, 8
[3] Phase-contrast imaging in aberration-corrected scanning transmission electron microscopy
Krumeich, F.
Mueller, E.
Wepf, R. A.
MICRON, 2013, 49 : 1 - 14
[4] Defect Characterization by Differential Phase Contrast Imaging Technique in Scanning Transmission Electron Microscope
Lin, Ching-Chun
Hsu, Kim
2019 IEEE 26TH INTERNATIONAL SYMPOSIUM ON PHYSICAL AND FAILURE ANALYSIS OF INTEGRATED CIRCUITS (IPFA), 2019,
[5] Application of Hilbert-differential phase contrast to scanning transmission electron microscopy
Iga, Haruka
Shimizu, Toshiki
Minoda, Hiroki
MICROSCOPY, 2024, 73 (05) : 414 - 421
[6] Phase-contrast scanning transmission electron microscopy
Minoda, Hiroki
Tamai, Takayuki
Iijima, Hirofumi
Hosokawa, Fumio
Kondo, Yukihito
MICROSCOPY, 2015, 64 (03) : 181 - 187
[7] Characterization of LiBC by phase-contrast scanning transmission electron microscopy
Krumeich, Frank
Woerle, Michael
Reibisch, Philipp
Nesper, Reinhard
MICRON, 2014, 63 : 64 - 68
[8] Quantitative scanning differential phase contrast microscopy
de Jonge, M. D.
Hornberger, B.
Holzner, C.
Twining, B.
Paterson, D.
McNulty, I.
Jacobsen, C.
Vogt, S.
9TH INTERNATIONAL CONFERENCE ON X-RAY MICROSCOPY, 2009, 186
[9] Probing the limits of the rigid-intensity-shift model in differential-phase-contrast scanning transmission electron microscopy
Clark, L.
Brown, H. G.
Paganin, D. M.
Morgan, M. J.
Matsumoto, T.
Shibata, N.
Petersen, T. C.
Findlay, S. D.
PHYSICAL REVIEW A, 2018, 97 (04)
[10] Factors limiting quantitative phase retrieval in atomic-resolution differential phase contrast scanning transmission electron microscopy using a segmented detector
Mawson, T.
Taplin, D. J.
Brown, H. G.
Clark, L.
Ishikawa, R.
Seki, T.
Ikuhara, Y.
Shibata, N.
Paganin, D. M.
Morgan, M. J.
Weyland, M.
Petersen, T. C.
Findlay, S. D.
ULTRAMICROSCOPY, 2022, 233

← 1 2 3 4 5 →