Direct evidence of compositional pulling effect in AlxGa1-xN epilayers

被引:38
|
作者
Lin, HY
Chen, YF [1 ]
Lin, TY
Shih, CF
Liu, KS
Chen, NC
机构
[1] Natl Taiwan Univ, Dept Phys, Taipei 106, Taiwan
[2] Natl Taiwan Ocean Univ, Inst Optoelect Sci, Chilung 202, Taiwan
[3] Natl Tsing Hua Univ, Dept Mat Sci & Engn, Hsinchu 300, Taiwan
[4] Chang Gung Univ, Inst Electroopt Engn, Taoyuan 333, Taiwan
关键词
cathodoluminescence; pulling effect; AlGaN;
D O I
10.1016/j.jcrysgro.2006.01.021
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
摘要
We report the investigation on the compositional-pulling effect of crystalline AlxGa1-xN/(0 0 0 1) sapphire epilayers by cross-sectional cathodoluminescence (CL) and energy-dispersive X-ray (EDX) analyses. Direct evidence for the compositional distribution was found in the AlxGa1-xN (0 < x < 0.3) layers, which accompany the different optical phenomena arising from the change of the band gap. The band gap variation of the 1.7 mu m AlxGa1-xN epilayers with the Al content rising from x = 11% to 30% was observed. It is consistent with the result of depth-resolved CL spectra acquired with increasing electron energies, which can also be used to reveal the spatial composition distribution along the growth direction. We emphasize here that the selective-wavelength CL image is a very powerful tool in exploring the correlation between the specific emission and the composition of inhomogeneous alloys. (c) 2006 Elsevier B.V. All rights reserved.
引用
收藏
页码:225 / 228
页数:4
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